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- W2078449919 abstract "Schottky barrier heights (SBH's), contact resistivities and solid-phase reactions at the interface of Ti/Si0.8Ge0.2/Si(100) systems have been investigated. At annealing temperatures below 300°C, Ti atoms react with Si atoms preferentially. Germanium atoms start to react above 400°C and the formation of C54-Ti(Si0.88Ge0.12)2 is confirmed by X-ray diffraction after annealing at 650°C. The annealing behavior of SBH's suggests that Ge atoms are segregated in SiGe layers at the interface, which is consistent with the results on interfacial reactions. For both n- and p-SiGe, the lower SBH's than Ti/Si(100) are obtained at 650°C, which is considered to be due to the work function of reaction products such as C54-Ti(Si1−yGey)2. The contact resistivities smaller than those expected from the SBH's are obtained for n+- and p+-SiGe at 580°C." @default.
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- W2078449919 date "1997-06-01" @default.
- W2078449919 modified "2023-10-18" @default.
- W2078449919 title "Interfacial reactions and electrical characteristics in Ti/SiGe/Si(100) contact systems" @default.
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- W2078449919 doi "https://doi.org/10.1016/s0169-4332(97)80101-8" @default.
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