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- W2078465021 abstract "This talk is devoted to the analysis of different ellipsometric methods for their ability to get separately thickness and refractive index of thin films. Such analysis is necessary for unambiguous determination of all thin film parameters, not only its 'optical thickness.' Analysis and comparison of different approaches for solving of this problem is made both on the base of the theoretical consideration of methods background and on the calculation of correlation matrix for parameters of interest." @default.
- W2078465021 created "2016-06-24" @default.
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- W2078465021 date "2001-08-10" @default.
- W2078465021 modified "2023-09-27" @default.
- W2078465021 title "<title>Comparison of ellipsometric methods for separate determination of thickness and optical constants of thin films</title>" @default.
- W2078465021 doi "https://doi.org/10.1117/12.435962" @default.
- W2078465021 hasPublicationYear "2001" @default.
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