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- W2078479973 abstract "Production of complex Micro-Opto Electro-Mechanical Systems (MOEMS) often requires assembly of a system from individual components built by mutually incompatible processes. This fabrication step also constitutes the largest portion of the total cost (about 80%), and is one of the major roadblocks to successfully implementing a complex microsystem. Our previous experience with such systems shows, that gripping and manipulation of microparts significantly differs from the assembly of macroscopic devices. The main difference stems from the increased role of the surface electrostatic forces and the reduced influence of body forces such as gravity. This paper describes one possible use of the surface forces in the development of a novel optically transparent electrostatic microgripper. The principle of operation, design and simulation of the new device are described. Several models describing the gripping force are also presented. The out-of-plane and in-plane holding (frictional) forces are measured as a function of the applied voltage for two common materials - silicon and nickel. The fabrication sequence and the materials used are discussed." @default.
- W2078479973 created "2016-06-24" @default.
- W2078479973 creator A5027259931 @default.
- W2078479973 creator A5085798271 @default.
- W2078479973 date "2001-10-08" @default.
- W2078479973 modified "2023-09-27" @default.
- W2078479973 title "Optically transparent gripper for microassembly" @default.
- W2078479973 doi "https://doi.org/10.1117/12.444143" @default.
- W2078479973 hasPublicationYear "2001" @default.
- W2078479973 type Work @default.
- W2078479973 sameAs 2078479973 @default.
- W2078479973 citedByCount "18" @default.
- W2078479973 countsByYear W20784799732012 @default.
- W2078479973 countsByYear W20784799732015 @default.
- W2078479973 countsByYear W20784799732016 @default.
- W2078479973 crossrefType "proceedings-article" @default.
- W2078479973 hasAuthorship W2078479973A5027259931 @default.
- W2078479973 hasAuthorship W2078479973A5085798271 @default.
- W2078479973 hasConcept C119599485 @default.
- W2078479973 hasConcept C121332964 @default.
- W2078479973 hasConcept C127413603 @default.
- W2078479973 hasConcept C136525101 @default.
- W2078479973 hasConcept C142724271 @default.
- W2078479973 hasConcept C151054161 @default.
- W2078479973 hasConcept C151827568 @default.
- W2078479973 hasConcept C165801399 @default.
- W2078479973 hasConcept C171250308 @default.
- W2078479973 hasConcept C17825722 @default.
- W2078479973 hasConcept C192562407 @default.
- W2078479973 hasConcept C204787440 @default.
- W2078479973 hasConcept C2524010 @default.
- W2078479973 hasConcept C2775960376 @default.
- W2078479973 hasConcept C33923547 @default.
- W2078479973 hasConcept C41008148 @default.
- W2078479973 hasConcept C57879066 @default.
- W2078479973 hasConcept C71924100 @default.
- W2078479973 hasConcept C78519656 @default.
- W2078479973 hasConceptScore W2078479973C119599485 @default.
- W2078479973 hasConceptScore W2078479973C121332964 @default.
- W2078479973 hasConceptScore W2078479973C127413603 @default.
- W2078479973 hasConceptScore W2078479973C136525101 @default.
- W2078479973 hasConceptScore W2078479973C142724271 @default.
- W2078479973 hasConceptScore W2078479973C151054161 @default.
- W2078479973 hasConceptScore W2078479973C151827568 @default.
- W2078479973 hasConceptScore W2078479973C165801399 @default.
- W2078479973 hasConceptScore W2078479973C171250308 @default.
- W2078479973 hasConceptScore W2078479973C17825722 @default.
- W2078479973 hasConceptScore W2078479973C192562407 @default.
- W2078479973 hasConceptScore W2078479973C204787440 @default.
- W2078479973 hasConceptScore W2078479973C2524010 @default.
- W2078479973 hasConceptScore W2078479973C2775960376 @default.
- W2078479973 hasConceptScore W2078479973C33923547 @default.
- W2078479973 hasConceptScore W2078479973C41008148 @default.
- W2078479973 hasConceptScore W2078479973C57879066 @default.
- W2078479973 hasConceptScore W2078479973C71924100 @default.
- W2078479973 hasConceptScore W2078479973C78519656 @default.
- W2078479973 hasLocation W20784799731 @default.
- W2078479973 hasOpenAccess W2078479973 @default.
- W2078479973 hasPrimaryLocation W20784799731 @default.
- W2078479973 hasRelatedWork W1982412345 @default.
- W2078479973 hasRelatedWork W2047472955 @default.
- W2078479973 hasRelatedWork W2070850903 @default.
- W2078479973 hasRelatedWork W2168357544 @default.
- W2078479973 hasRelatedWork W2219931088 @default.
- W2078479973 hasRelatedWork W2289392542 @default.
- W2078479973 hasRelatedWork W2899084033 @default.
- W2078479973 hasRelatedWork W600213277 @default.
- W2078479973 hasRelatedWork W152998012 @default.
- W2078479973 hasRelatedWork W1740701373 @default.
- W2078479973 isParatext "false" @default.
- W2078479973 isRetracted "false" @default.
- W2078479973 magId "2078479973" @default.
- W2078479973 workType "article" @default.