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• W2078487767 abstract "Concentration profiles of fluorine in isochronal vacuum-annealed single-crystal Si and SiO2/Si structures implanted with 2*1015 111 keV 11B19F2+ ions cm-2 have been studied by the nuclear resonance broadening technique through the reaction 19F(p, alpha gamma )16O. No loss or redistribution of fluorine was observed in either the Si or SiO2/Si samples for 30 min anneals up to 700 degrees C. Annealing the Si targets above this temperature led to loss and redistribution (up to 80% at 1000 degrees C) of fluorine. Annealing of the SiO2/Si samples at 900 degrees C and above led to lower loss (10% at 1000 degrees C) and agglomeration of the fluorine, most probably at the SiO2/Si interface." @default.
• W2078487767 created "2016-06-24" @default.
• W2078487767 creator A5038184328 @default.
• W2078487767 creator A5058437202 @default.
• W2078487767 creator A5067395791 @default.
• W2078487767 creator A5084266019 @default.
• W2078487767 date "1987-09-01" @default.
• W2078487767 modified "2023-09-30" @default.
• W2078487767 title "Thermal redistribution of fluorine in BF2+-implanted SiO2/Si structures" @default.
• W2078487767 cites W1970501984 @default.
• W2078487767 cites W1975796157 @default.
• W2078487767 cites W1981040052 @default.
• W2078487767 cites W1981624970 @default.
• W2078487767 cites W1988557370 @default.
• W2078487767 cites W1992843010 @default.
• W2078487767 cites W2000306401 @default.
• W2078487767 cites W2000809569 @default.
• W2078487767 cites W2001765417 @default.
• W2078487767 cites W2002955584 @default.
• W2078487767 cites W2003419483 @default.
• W2078487767 cites W2007051384 @default.
• W2078487767 cites W2012199654 @default.
• W2078487767 cites W2012258843 @default.
• W2078487767 cites W2021559436 @default.
• W2078487767 cites W2029588654 @default.
• W2078487767 cites W2029806001 @default.
• W2078487767 cites W2032551921 @default.
• W2078487767 cites W2032659705 @default.
• W2078487767 cites W2041930428 @default.
• W2078487767 cites W2045505705 @default.
• W2078487767 cites W2055409045 @default.
• W2078487767 cites W2057022967 @default.
• W2078487767 cites W2070159763 @default.
• W2078487767 cites W2075261278 @default.
• W2078487767 cites W2090965478 @default.
• W2078487767 cites W2092909546 @default.
• W2078487767 cites W2247979066 @default.
• W2078487767 cites W2897500882 @default.
• W2078487767 doi "https://doi.org/10.1088/0268-1242/2/9/010" @default.
• W2078487767 hasPublicationYear "1987" @default.
• W2078487767 type Work @default.
• W2078487767 sameAs 2078487767 @default.
• W2078487767 citedByCount "4" @default.
• W2078487767 crossrefType "journal-article" @default.
• W2078487767 hasAuthorship W2078487767A5038184328 @default.
• W2078487767 hasAuthorship W2078487767A5058437202 @default.
• W2078487767 hasAuthorship W2078487767A5067395791 @default.
• W2078487767 hasAuthorship W2078487767A5084266019 @default.
• W2078487767 hasConcept C113196181 @default.
• W2078487767 hasConcept C145148216 @default.
• W2078487767 hasConcept C177322064 @default.
• W2078487767 hasConcept C17744445 @default.
• W2078487767 hasConcept C178790620 @default.
• W2078487767 hasConcept C185592680 @default.
• W2078487767 hasConcept C191897082 @default.
• W2078487767 hasConcept C192562407 @default.
• W2078487767 hasConcept C199539241 @default.
• W2078487767 hasConcept C2777855556 @default.
• W2078487767 hasConcept C43617362 @default.
• W2078487767 hasConcept C506198293 @default.
• W2078487767 hasConcept C74080474 @default.
• W2078487767 hasConcept C94625758 @default.
• W2078487767 hasConceptScore W2078487767C113196181 @default.
• W2078487767 hasConceptScore W2078487767C145148216 @default.
• W2078487767 hasConceptScore W2078487767C177322064 @default.
• W2078487767 hasConceptScore W2078487767C17744445 @default.
• W2078487767 hasConceptScore W2078487767C178790620 @default.
• W2078487767 hasConceptScore W2078487767C185592680 @default.
• W2078487767 hasConceptScore W2078487767C191897082 @default.
• W2078487767 hasConceptScore W2078487767C192562407 @default.
• W2078487767 hasConceptScore W2078487767C199539241 @default.
• W2078487767 hasConceptScore W2078487767C2777855556 @default.
• W2078487767 hasConceptScore W2078487767C43617362 @default.
• W2078487767 hasConceptScore W2078487767C506198293 @default.
• W2078487767 hasConceptScore W2078487767C74080474 @default.
• W2078487767 hasConceptScore W2078487767C94625758 @default.
• W2078487767 hasLocation W20784877671 @default.
• W2078487767 hasOpenAccess W2078487767 @default.
• W2078487767 hasPrimaryLocation W20784877671 @default.
• W2078487767 hasRelatedWork W1983713149 @default.
• W2078487767 hasRelatedWork W1993311305 @default.
• W2078487767 hasRelatedWork W2024077629 @default.
• W2078487767 hasRelatedWork W2032559380 @default.
• W2078487767 hasRelatedWork W2034137745 @default.
• W2078487767 hasRelatedWork W2036210415 @default.
• W2078487767 hasRelatedWork W2036686057 @default.
• W2078487767 hasRelatedWork W2058887121 @default.
• W2078487767 hasRelatedWork W2060434811 @default.
• W2078487767 hasRelatedWork W2063390311 @default.
• W2078487767 hasRelatedWork W2070251278 @default.
• W2078487767 hasRelatedWork W2093450683 @default.
• W2078487767 hasRelatedWork W2155159175 @default.
• W2078487767 hasRelatedWork W2332291112 @default.
• W2078487767 hasRelatedWork W2337852822 @default.
• W2078487767 hasRelatedWork W2588115451 @default.
• W2078487767 hasRelatedWork W2946897738 @default.
• W2078487767 hasRelatedWork W67663331 @default.
• W2078487767 hasRelatedWork W68710991 @default.
• W2078487767 hasRelatedWork W97564084 @default.
• W2078487767 isParatext "false" @default.

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