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• W2078491678 abstract "Abstract Mobile inorganic anions such as chloride, sulfate and nitrate were determined up to an analyte-to-matrix-ratio (ATMR) of 1:104 using capillary zone electrophoresis. On adjusting the mobility and the concentration of the co-ion of the electrolyte to an isotachophoretic initial state, the detection limit of the analytes was improved by a factor of 2 by increasing the plate numbers through the isotachophoretic state. The ATMR could be increased to 1:6 · 104. These optimized conditions were applied to the determination of anionogenic impurities on experimental silicon wafer surfaces (d = 150 mm) after dissolution of the native oxide of silicon in isothermally distilled hydrofluoric acid vapour down to the range of 109 anions/cm2. The mobile organic anion oxalate was identified on silicon wafer surfaces for the first time." @default.
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• W2078491678 date "1995-04-01" @default.
• W2078491678 modified "2023-10-01" @default.
• W2078491678 title "Application of capillary zone electrophoresis with an isotachophoretic initial state to determine anionic impurities on as-polished silicon wafer surfaces" @default.
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• W2078491678 doi "https://doi.org/10.1016/0021-9673(94)01227-6" @default.
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