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- W2078557613 abstract "Abstract In this paper, we present the experimental results on critical dimension (CD) control via real-time temperature control for warped wafers. As opposed to run-to-run control where information from the previous wafer or batch is used for control of the current wafer or batch, the approach here is real-time and make use of current information for control of the current wafer CD. In this paper we demonstrate that real-time control of the post-exposure bake temperature to give nonuniform temperature distribution across the warped wafer can reduce CD nonuniformity across the wafer." @default.
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- W2078557613 date "2008-12-01" @default.
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- W2078557613 title "Critical dimension and real-time temperature control for warped wafers" @default.
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- W2078557613 doi "https://doi.org/10.1016/j.jprocont.2007.11.009" @default.
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