FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2078588086> ?p ?o ?g. }

• W2078588086 abstract "In the fabrication of MEMS devices, what has come to be known as release stiction occurs when the device is removed from the liquid phase into the ambient air. One widely used method for dealing with stiction is to deposit a hydrophobic coating on the surface of the device before it is removed from the liquid phase. This method can produce coatings with inconsistent morphology and device yield. This is to be compared with a new coating deposition scheme developed at Sandia National Labs, termed VSAMS (vapor-deposited self-assembled monolayers) that employs supercritical CO₂ drying and chemical vapor deposition to address many of the concerns associated with release stiction. VSAMS is attractive due to its process benefits, which include increased throughput, reduced waste, and most importantly, it can be easily scaled to full wafer production. It is also attractive because films produced by this method are uniform and very hydrophobic. The deposition step makes use of a class of compound that is particularly suited for vapor phase reactions, amino-functionalized silanes. The yield of microengine test devices coated with films made from amino-functionalized silanes was examined over an extended period. Their function was determined before and after the application of VSAMS. The advantage of using amino-functionalized silane precursors for VSAMS is related to the strength of the bond between the film and the polysilicon surface as evidenced by the fact that films made with these precursors are stable across the entire humidity scale." @default.
• W2078588086 created "2016-06-24" @default.
• W2078588086 creator A5005439164 @default.
• W2078588086 creator A5017263602 @default.
• W2078588086 creator A5020420321 @default.
• W2078588086 creator A5020782874 @default.
• W2078588086 creator A5050228339 @default.
• W2078588086 creator A5060390526 @default.
• W2078588086 creator A5079835396 @default.
• W2078588086 date "2003-01-25" @default.
• W2078588086 modified "2023-10-18" @default.
• W2078588086 title "Vapor deposition of amino-functionalized self-assembled monolayers on MEMS" @default.
• W2078588086 doi "https://doi.org/10.1117/12.478206" @default.
• W2078588086 hasPublicationYear "2003" @default.
• W2078588086 type Work @default.
• W2078588086 sameAs 2078588086 @default.
• W2078588086 citedByCount "44" @default.
• W2078588086 countsByYear W20785880862013 @default.
• W2078588086 countsByYear W20785880862015 @default.
• W2078588086 countsByYear W20785880862016 @default.
• W2078588086 countsByYear W20785880862017 @default.
• W2078588086 countsByYear W20785880862018 @default.
• W2078588086 countsByYear W20785880862020 @default.
• W2078588086 crossrefType "proceedings-article" @default.
• W2078588086 hasAuthorship W2078588086A5005439164 @default.
• W2078588086 hasAuthorship W2078588086A5017263602 @default.
• W2078588086 hasAuthorship W2078588086A5020420321 @default.
• W2078588086 hasAuthorship W2078588086A5020782874 @default.
• W2078588086 hasAuthorship W2078588086A5050228339 @default.
• W2078588086 hasAuthorship W2078588086A5060390526 @default.
• W2078588086 hasAuthorship W2078588086A5079835396 @default.
• W2078588086 hasConcept C110339231 @default.
• W2078588086 hasConcept C112439578 @default.
• W2078588086 hasConcept C118419359 @default.
• W2078588086 hasConcept C127413603 @default.
• W2078588086 hasConcept C134121241 @default.
• W2078588086 hasConcept C136525101 @default.
• W2078588086 hasConcept C142724271 @default.
• W2078588086 hasConcept C151730666 @default.
• W2078588086 hasConcept C159985019 @default.
• W2078588086 hasConcept C160671074 @default.
• W2078588086 hasConcept C171250308 @default.
• W2078588086 hasConcept C178790620 @default.
• W2078588086 hasConcept C185592680 @default.
• W2078588086 hasConcept C192562407 @default.
• W2078588086 hasConcept C204787440 @default.
• W2078588086 hasConcept C2778024649 @default.
• W2078588086 hasConcept C2778183973 @default.
• W2078588086 hasConcept C2778645564 @default.
• W2078588086 hasConcept C2779248272 @default.
• W2078588086 hasConcept C2781448156 @default.
• W2078588086 hasConcept C2816523 @default.
• W2078588086 hasConcept C37977207 @default.
• W2078588086 hasConcept C42360764 @default.
• W2078588086 hasConcept C49040817 @default.
• W2078588086 hasConcept C544956773 @default.
• W2078588086 hasConcept C57410435 @default.
• W2078588086 hasConcept C64297162 @default.
• W2078588086 hasConcept C7070889 @default.
• W2078588086 hasConcept C71924100 @default.
• W2078588086 hasConcept C86803240 @default.
• W2078588086 hasConceptScore W2078588086C110339231 @default.
• W2078588086 hasConceptScore W2078588086C112439578 @default.
• W2078588086 hasConceptScore W2078588086C118419359 @default.
• W2078588086 hasConceptScore W2078588086C127413603 @default.
• W2078588086 hasConceptScore W2078588086C134121241 @default.
• W2078588086 hasConceptScore W2078588086C136525101 @default.
• W2078588086 hasConceptScore W2078588086C142724271 @default.
• W2078588086 hasConceptScore W2078588086C151730666 @default.
• W2078588086 hasConceptScore W2078588086C159985019 @default.
• W2078588086 hasConceptScore W2078588086C160671074 @default.
• W2078588086 hasConceptScore W2078588086C171250308 @default.
• W2078588086 hasConceptScore W2078588086C178790620 @default.
• W2078588086 hasConceptScore W2078588086C185592680 @default.
• W2078588086 hasConceptScore W2078588086C192562407 @default.
• W2078588086 hasConceptScore W2078588086C204787440 @default.
• W2078588086 hasConceptScore W2078588086C2778024649 @default.
• W2078588086 hasConceptScore W2078588086C2778183973 @default.
• W2078588086 hasConceptScore W2078588086C2778645564 @default.
• W2078588086 hasConceptScore W2078588086C2779248272 @default.
• W2078588086 hasConceptScore W2078588086C2781448156 @default.
• W2078588086 hasConceptScore W2078588086C2816523 @default.
• W2078588086 hasConceptScore W2078588086C37977207 @default.
• W2078588086 hasConceptScore W2078588086C42360764 @default.
• W2078588086 hasConceptScore W2078588086C49040817 @default.
• W2078588086 hasConceptScore W2078588086C544956773 @default.
• W2078588086 hasConceptScore W2078588086C57410435 @default.
• W2078588086 hasConceptScore W2078588086C64297162 @default.
• W2078588086 hasConceptScore W2078588086C7070889 @default.
• W2078588086 hasConceptScore W2078588086C71924100 @default.
• W2078588086 hasConceptScore W2078588086C86803240 @default.
• W2078588086 hasLocation W20785880861 @default.
• W2078588086 hasOpenAccess W2078588086 @default.
• W2078588086 hasPrimaryLocation W20785880861 @default.
• W2078588086 hasRelatedWork W1585591899 @default.
• W2078588086 hasRelatedWork W1967341818 @default.
• W2078588086 hasRelatedWork W2011736499 @default.
• W2078588086 hasRelatedWork W2011881970 @default.
• W2078588086 hasRelatedWork W2048616423 @default.
• W2078588086 hasRelatedWork W2056306609 @default.

• next