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- W2078591256 abstract "Plasma polymerized methyl-methacrylate (PPMMA) thin films were formed under various conditions in an ac glow discharge using a bell-jar type reactor with parallel plate electrodes. It has been found that the deposition rate increases in the frequency range from 10 to 50 kHz. The possibility of using the films as an electron beam resist has been investigated." @default.
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- W2078591256 date "1983-05-01" @default.
- W2078591256 modified "2023-09-26" @default.
- W2078591256 title "Thin films prepared by plasma polymerization of methyl-methacrylate and their properties as an electron beam resist" @default.
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- W2078591256 doi "https://doi.org/10.1016/0042-207x(83)90088-x" @default.
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