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• W2078603569 abstract "Abstract We studied the correlation between CH 4 -plasma parameters and the properties of thin diamond-like carbon films deposited using electron–cyclotron–resonance chemical vapor deposition. The deposition was done with the contribution of the ions incident to the sample. We attribute the high quality of the films to the ions penetrating the sample and transferring their energy at 16 eV/A with a flux density same as that of radicals." @default.
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• W2078603569 date "2002-08-01" @default.
• W2078603569 modified "2023-09-27" @default.
• W2078603569 title "ECR-plasma parameters and properties of thin DLC films" @default.
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• W2078603569 doi "https://doi.org/10.1016/s0042-207x(02)00120-3" @default.
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