Matches in SemOpenAlex for { <https://semopenalex.org/work/W2078657312> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2078657312 endingPage "590" @default.
- W2078657312 startingPage "586" @default.
- W2078657312 abstract "We synthesized diethylamido tantalum (EtN=Ta(NEt2)3+Ta(NEt2)4) and diethylamido hafnium (Hf(NEt2)4), using nearly identical methods, as precursors for Ta- and Hf-compound films. Both precursors were liquid at room temperature and had vapor pressure (Ta: 6 Torr at 60°C, Hf: 7.5 Torr at 80°C) moderate enough for chemical vapor deposition (CVD). We deposited TaN thin films from diethylamido Ta and HfO2 thin films from Hf(NEt2)4/O2 using metal-organic CVD. The TaN films were amorphous and the HfO2 films were polycrystalline. Both types had good-quality step coverage." @default.
- W2078657312 created "2016-06-24" @default.
- W2078657312 creator A5004609434 @default.
- W2078657312 creator A5030921201 @default.
- W2078657312 creator A5034183107 @default.
- W2078657312 creator A5058223272 @default.
- W2078657312 creator A5087303501 @default.
- W2078657312 date "2002-04-01" @default.
- W2078657312 modified "2023-10-03" @default.
- W2078657312 title "MOCVD precursors for Ta- and Hf-compound films" @default.
- W2078657312 cites W1970200102 @default.
- W2078657312 cites W2008449124 @default.
- W2078657312 cites W2018091598 @default.
- W2078657312 cites W2018819617 @default.
- W2078657312 cites W2041062085 @default.
- W2078657312 cites W2070236029 @default.
- W2078657312 doi "https://doi.org/10.1016/s0022-0248(01)01963-7" @default.
- W2078657312 hasPublicationYear "2002" @default.
- W2078657312 type Work @default.
- W2078657312 sameAs 2078657312 @default.
- W2078657312 citedByCount "15" @default.
- W2078657312 countsByYear W20786573122013 @default.
- W2078657312 countsByYear W20786573122016 @default.
- W2078657312 countsByYear W20786573122018 @default.
- W2078657312 countsByYear W20786573122019 @default.
- W2078657312 crossrefType "journal-article" @default.
- W2078657312 hasAuthorship W2078657312A5004609434 @default.
- W2078657312 hasAuthorship W2078657312A5030921201 @default.
- W2078657312 hasAuthorship W2078657312A5034183107 @default.
- W2078657312 hasAuthorship W2078657312A5058223272 @default.
- W2078657312 hasAuthorship W2078657312A5087303501 @default.
- W2078657312 hasConcept C110738630 @default.
- W2078657312 hasConcept C113196181 @default.
- W2078657312 hasConcept C121332964 @default.
- W2078657312 hasConcept C137637335 @default.
- W2078657312 hasConcept C171250308 @default.
- W2078657312 hasConcept C175665537 @default.
- W2078657312 hasConcept C178790620 @default.
- W2078657312 hasConcept C179104552 @default.
- W2078657312 hasConcept C185592680 @default.
- W2078657312 hasConcept C19067145 @default.
- W2078657312 hasConcept C192562407 @default.
- W2078657312 hasConcept C2779227376 @default.
- W2078657312 hasConcept C30646810 @default.
- W2078657312 hasConcept C514619126 @default.
- W2078657312 hasConcept C534791751 @default.
- W2078657312 hasConcept C546638069 @default.
- W2078657312 hasConcept C56052488 @default.
- W2078657312 hasConcept C57410435 @default.
- W2078657312 hasConcept C8010536 @default.
- W2078657312 hasConcept C97355855 @default.
- W2078657312 hasConceptScore W2078657312C110738630 @default.
- W2078657312 hasConceptScore W2078657312C113196181 @default.
- W2078657312 hasConceptScore W2078657312C121332964 @default.
- W2078657312 hasConceptScore W2078657312C137637335 @default.
- W2078657312 hasConceptScore W2078657312C171250308 @default.
- W2078657312 hasConceptScore W2078657312C175665537 @default.
- W2078657312 hasConceptScore W2078657312C178790620 @default.
- W2078657312 hasConceptScore W2078657312C179104552 @default.
- W2078657312 hasConceptScore W2078657312C185592680 @default.
- W2078657312 hasConceptScore W2078657312C19067145 @default.
- W2078657312 hasConceptScore W2078657312C192562407 @default.
- W2078657312 hasConceptScore W2078657312C2779227376 @default.
- W2078657312 hasConceptScore W2078657312C30646810 @default.
- W2078657312 hasConceptScore W2078657312C514619126 @default.
- W2078657312 hasConceptScore W2078657312C534791751 @default.
- W2078657312 hasConceptScore W2078657312C546638069 @default.
- W2078657312 hasConceptScore W2078657312C56052488 @default.
- W2078657312 hasConceptScore W2078657312C57410435 @default.
- W2078657312 hasConceptScore W2078657312C8010536 @default.
- W2078657312 hasConceptScore W2078657312C97355855 @default.
- W2078657312 hasLocation W20786573121 @default.
- W2078657312 hasOpenAccess W2078657312 @default.
- W2078657312 hasPrimaryLocation W20786573121 @default.
- W2078657312 hasRelatedWork W1645342641 @default.
- W2078657312 hasRelatedWork W1828182929 @default.
- W2078657312 hasRelatedWork W2002397887 @default.
- W2078657312 hasRelatedWork W2005932269 @default.
- W2078657312 hasRelatedWork W2007749909 @default.
- W2078657312 hasRelatedWork W2040216855 @default.
- W2078657312 hasRelatedWork W2062329057 @default.
- W2078657312 hasRelatedWork W2073199838 @default.
- W2078657312 hasRelatedWork W2078657312 @default.
- W2078657312 hasRelatedWork W2160856925 @default.
- W2078657312 hasVolume "237-239" @default.
- W2078657312 isParatext "false" @default.
- W2078657312 isRetracted "false" @default.
- W2078657312 magId "2078657312" @default.
- W2078657312 workType "article" @default.