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- W2078671753 abstract "We developed subhalf micron steppers, the FPA-2500i2 and the FPA-2500i3 (abbreviated here as i2 and i3, respectively), suitable to 16 M and 64 M DRAM processes. These new steppers incorporate high sensitivity reticle particle monitors (RPM) in order to increase chip yield. In this report, first the steppers' basic performance is demonstrated. Secondly, the printability of particles and its influence on circuit patterns are quantified by simulations and experiments. Thirdly, the RPM's detection principle is discussed theoretically, and finally the experimental results are shown." @default.
- W2078671753 created "2016-06-24" @default.
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- W2078671753 date "1993-08-08" @default.
- W2078671753 modified "2023-09-23" @default.
- W2078671753 title "Subhalf-micron stepper with a reticle particle monitor" @default.
- W2078671753 doi "https://doi.org/10.1117/12.150453" @default.
- W2078671753 hasPublicationYear "1993" @default.
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