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• W2078684111 endingPage "1495" @default.
• W2078684111 startingPage "1491" @default.
• W2078684111 abstract "Dielectric barrier discharge (DBD) CH4 plasmas during diamond-like carbon (DLC) film deposition have been characterized in-situ by means of optical emission spectrometry (OES), the Langmuir double probe method and molecular beam mass spectrometry (MBMS). With a 1.4 kHz, 30-kV peak voltage DBD power source, while the Pd-value (the product of CH4 pressure P, and discharge gas spacing d) decreases from ∼14 to 4 torr mm, the measured electron temperature and the hydrogen atom excitation temperature of the CH4 plasmas rise from ∼3.0 to 5.8 eV, and from ∼6.3×103 to 7.8×103 K, respectively. The higher electron temperature and H excitation temperature of the plasmas at smaller Pd, imply the generation of more energetic ions in the plasma sheath near the film surface, that is confirmed by the MBMS observations. The MBMS experiments also show that the major ions near the coating are CH3+, CH2+, CH+ and C+, which are mainly produced through the collisions between fast CHx+ (x=1–4) and neutral CH4 molecules in the plasma sheath region." @default.
• W2078684111 created "2016-06-24" @default.
• W2078684111 creator A5009719661 @default.
• W2078684111 creator A5017971486 @default.
• W2078684111 creator A5020781164 @default.
• W2078684111 creator A5034254855 @default.
• W2078684111 creator A5050304281 @default.
• W2078684111 creator A5055826220 @default.
• W2078684111 creator A5057035718 @default.
• W2078684111 date "2002-08-01" @default.
• W2078684111 modified "2023-10-09" @default.
• W2078684111 title "Diagnosis of dielectric barrier discharge CH4 plasmas for diamond-like carbon film deposition" @default.
• W2078684111 cites W1964079778 @default.
• W2078684111 cites W1982743546 @default.
• W2078684111 cites W2003760621 @default.
• W2078684111 cites W2003805587 @default.
• W2078684111 cites W2017692515 @default.
• W2078684111 cites W2042048864 @default.
• W2078684111 cites W2067933285 @default.
• W2078684111 cites W2068483101 @default.
• W2078684111 cites W2097367447 @default.
• W2078684111 cites W2109468230 @default.
• W2078684111 doi "https://doi.org/10.1016/s0925-9635(02)00050-x" @default.
• W2078684111 hasPublicationYear "2002" @default.
• W2078684111 type Work @default.
• W2078684111 sameAs 2078684111 @default.
• W2078684111 citedByCount "31" @default.
• W2078684111 countsByYear W20786841112013 @default.
• W2078684111 countsByYear W20786841112014 @default.
• W2078684111 countsByYear W20786841112016 @default.
• W2078684111 countsByYear W20786841112020 @default.
• W2078684111 countsByYear W20786841112021 @default.
• W2078684111 crossrefType "journal-article" @default.
• W2078684111 hasAuthorship W2078684111A5009719661 @default.
• W2078684111 hasAuthorship W2078684111A5017971486 @default.
• W2078684111 hasAuthorship W2078684111A5020781164 @default.
• W2078684111 hasAuthorship W2078684111A5034254855 @default.
• W2078684111 hasAuthorship W2078684111A5050304281 @default.
• W2078684111 hasAuthorship W2078684111A5055826220 @default.
• W2078684111 hasAuthorship W2078684111A5057035718 @default.
• W2078684111 hasConcept C104779481 @default.
• W2078684111 hasConcept C113196181 @default.
• W2078684111 hasConcept C119599485 @default.
• W2078684111 hasConcept C121332964 @default.
• W2078684111 hasConcept C123380192 @default.
• W2078684111 hasConcept C127413603 @default.
• W2078684111 hasConcept C1276947 @default.
• W2078684111 hasConcept C133386390 @default.
• W2078684111 hasConcept C140205800 @default.
• W2078684111 hasConcept C145148216 @default.
• W2078684111 hasConcept C159985019 @default.
• W2078684111 hasConcept C171250308 @default.
• W2078684111 hasConcept C176118016 @default.
• W2078684111 hasConcept C178790620 @default.
• W2078684111 hasConcept C184779094 @default.
• W2078684111 hasConcept C185592680 @default.
• W2078684111 hasConcept C19067145 @default.
• W2078684111 hasConcept C192562407 @default.
• W2078684111 hasConcept C22175881 @default.
• W2078684111 hasConcept C2776921476 @default.
• W2078684111 hasConcept C2780837039 @default.
• W2078684111 hasConcept C30646810 @default.
• W2078684111 hasConcept C43503373 @default.
• W2078684111 hasConcept C43617362 @default.
• W2078684111 hasConcept C4839761 @default.
• W2078684111 hasConcept C49040817 @default.
• W2078684111 hasConcept C512968161 @default.
• W2078684111 hasConcept C62520636 @default.
• W2078684111 hasConcept C82706917 @default.
• W2078684111 hasConcept C83581075 @default.
• W2078684111 hasConcept C89448510 @default.
• W2078684111 hasConcept C96141758 @default.
• W2078684111 hasConcept C97355855 @default.
• W2078684111 hasConceptScore W2078684111C104779481 @default.
• W2078684111 hasConceptScore W2078684111C113196181 @default.
• W2078684111 hasConceptScore W2078684111C119599485 @default.
• W2078684111 hasConceptScore W2078684111C121332964 @default.
• W2078684111 hasConceptScore W2078684111C123380192 @default.
• W2078684111 hasConceptScore W2078684111C127413603 @default.
• W2078684111 hasConceptScore W2078684111C1276947 @default.
• W2078684111 hasConceptScore W2078684111C133386390 @default.
• W2078684111 hasConceptScore W2078684111C140205800 @default.
• W2078684111 hasConceptScore W2078684111C145148216 @default.
• W2078684111 hasConceptScore W2078684111C159985019 @default.
• W2078684111 hasConceptScore W2078684111C171250308 @default.
• W2078684111 hasConceptScore W2078684111C176118016 @default.
• W2078684111 hasConceptScore W2078684111C178790620 @default.
• W2078684111 hasConceptScore W2078684111C184779094 @default.
• W2078684111 hasConceptScore W2078684111C185592680 @default.
• W2078684111 hasConceptScore W2078684111C19067145 @default.
• W2078684111 hasConceptScore W2078684111C192562407 @default.
• W2078684111 hasConceptScore W2078684111C22175881 @default.
• W2078684111 hasConceptScore W2078684111C2776921476 @default.
• W2078684111 hasConceptScore W2078684111C2780837039 @default.
• W2078684111 hasConceptScore W2078684111C30646810 @default.
• W2078684111 hasConceptScore W2078684111C43503373 @default.
• W2078684111 hasConceptScore W2078684111C43617362 @default.
• W2078684111 hasConceptScore W2078684111C4839761 @default.

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