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• W2078707146 abstract "We report on sub-micrometer thick LiNbO3 films produced by an improved crystal ion slicing and bonding technique using polymer adhesive benzocyclobutene. The latter enables to reproducibly fabricate defect-free films with an area of several cm2. The method supports also integration of tuning electrodes enabling realization of complex electro-optically active photonic devices on a single chip. Furthermore, the structuring techniques to produce high-index-contrast (Δn ≈ 0.65) single-mode optical waveguides are described. The big potential of the novel LiNbO3 thin films for high-density integrated optics applications is shown on an example of electro-optically tunable microring resonator." @default.
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• W2078707146 date "2009-05-01" @default.
• W2078707146 modified "2023-10-18" @default.
• W2078707146 title "Ion-sliced lithium niobate thin films for active photonic devices" @default.
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• W2078707146 doi "https://doi.org/10.1016/j.optmat.2007.12.019" @default.
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