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- W2078763459 endingPage "762" @default.
- W2078763459 startingPage "751" @default.
- W2078763459 abstract "An extension to the kinetic Monte Carlo simulation technique was developed in order to study thin film deposition and growth of a system approximating polycrystalline silicon. This method was developed to determine the effect of varying the angle of incidence of an atomic beam on the morphology of a poly-Si thin film grown on a crystalline Si substrate. This deposition procedure produced material comprised of individual grains, all with identical orientation; a first step towards modelling poly-Si. The addition of such grains does not significantly affect the bulk film properties relative to the single crystal case. The number of initial grains chosen to represent a set of pre-existing grains on the surface does not affect the gross morphology of the grown film once around 40 monolayers have been deposited. The chief advantage of this polycrystalline-like system is that it allows the observation of both columnar growth (at angles below about 65°) and dendritic growth at angles above this value; growth of single crystalline material only shows the latter. This fact allows a comparison of results from atomic-scale simulation to existing theories that relate the angle of the morphological features of the grown film to the angle of the incident beam. We show that the simulation data are not particularly well represented by commonly used theories such as the tangent rule, or that due to Tait et al (1993 Thin Solid Films 226 196). Increased angles of incidence cause faster extinction of grains until a steady-state value of the number of grains is reached. When grains are nucleated on a heterogeneous substrate, here chosen as a crude description of Si on glass, increased substrate temperature results in larger grains, and higher angles of incidence result in fewer nucleated grains due to non-local shadowing." @default.
- W2078763459 created "2016-06-24" @default.
- W2078763459 creator A5004904449 @default.
- W2078763459 creator A5030863265 @default.
- W2078763459 date "2000-08-30" @default.
- W2078763459 modified "2023-09-26" @default.
- W2078763459 title "A simple model for the growth of polycrystalline Si using the kinetic Monte Carlo simulation" @default.
- W2078763459 cites W1966141191 @default.
- W2078763459 cites W1983241241 @default.
- W2078763459 cites W2012467245 @default.
- W2078763459 cites W2023096045 @default.
- W2078763459 cites W2047924138 @default.
- W2078763459 cites W2064311999 @default.
- W2078763459 cites W2071123162 @default.
- W2078763459 cites W2072931187 @default.
- W2078763459 cites W2074206055 @default.
- W2078763459 cites W2090323798 @default.
- W2078763459 cites W2094294887 @default.
- W2078763459 doi "https://doi.org/10.1088/0965-0393/8/5/308" @default.
- W2078763459 hasPublicationYear "2000" @default.
- W2078763459 type Work @default.
- W2078763459 sameAs 2078763459 @default.
- W2078763459 citedByCount "45" @default.
- W2078763459 countsByYear W20787634592012 @default.
- W2078763459 countsByYear W20787634592013 @default.
- W2078763459 countsByYear W20787634592014 @default.
- W2078763459 countsByYear W20787634592018 @default.
- W2078763459 crossrefType "journal-article" @default.
- W2078763459 hasAuthorship W2078763459A5004904449 @default.
- W2078763459 hasAuthorship W2078763459A5030863265 @default.
- W2078763459 hasConcept C105795698 @default.
- W2078763459 hasConcept C111472728 @default.
- W2078763459 hasConcept C121332964 @default.
- W2078763459 hasConcept C121864883 @default.
- W2078763459 hasConcept C135889238 @default.
- W2078763459 hasConcept C137637335 @default.
- W2078763459 hasConcept C138885662 @default.
- W2078763459 hasConcept C191897082 @default.
- W2078763459 hasConcept C192562407 @default.
- W2078763459 hasConcept C19499675 @default.
- W2078763459 hasConcept C2780586882 @default.
- W2078763459 hasConcept C33923547 @default.
- W2078763459 hasConcept C45786274 @default.
- W2078763459 hasConcept C74650414 @default.
- W2078763459 hasConceptScore W2078763459C105795698 @default.
- W2078763459 hasConceptScore W2078763459C111472728 @default.
- W2078763459 hasConceptScore W2078763459C121332964 @default.
- W2078763459 hasConceptScore W2078763459C121864883 @default.
- W2078763459 hasConceptScore W2078763459C135889238 @default.
- W2078763459 hasConceptScore W2078763459C137637335 @default.
- W2078763459 hasConceptScore W2078763459C138885662 @default.
- W2078763459 hasConceptScore W2078763459C191897082 @default.
- W2078763459 hasConceptScore W2078763459C192562407 @default.
- W2078763459 hasConceptScore W2078763459C19499675 @default.
- W2078763459 hasConceptScore W2078763459C2780586882 @default.
- W2078763459 hasConceptScore W2078763459C33923547 @default.
- W2078763459 hasConceptScore W2078763459C45786274 @default.
- W2078763459 hasConceptScore W2078763459C74650414 @default.
- W2078763459 hasIssue "5" @default.
- W2078763459 hasLocation W20787634591 @default.
- W2078763459 hasOpenAccess W2078763459 @default.
- W2078763459 hasPrimaryLocation W20787634591 @default.
- W2078763459 hasRelatedWork W1599421969 @default.
- W2078763459 hasRelatedWork W1814245173 @default.
- W2078763459 hasRelatedWork W1981952064 @default.
- W2078763459 hasRelatedWork W2017492354 @default.
- W2078763459 hasRelatedWork W2021702532 @default.
- W2078763459 hasRelatedWork W2471624904 @default.
- W2078763459 hasRelatedWork W3158364756 @default.
- W2078763459 hasRelatedWork W643875032 @default.
- W2078763459 hasRelatedWork W948699967 @default.
- W2078763459 hasRelatedWork W46272061 @default.
- W2078763459 hasVolume "8" @default.
- W2078763459 isParatext "false" @default.
- W2078763459 isRetracted "false" @default.
- W2078763459 magId "2078763459" @default.
- W2078763459 workType "article" @default.