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- W2078786330 abstract "The paper presents the manufacturing of GaN based single SAW resonator temperature sensing structures, having IDTs with fingers/interdigit spacing width within 200-120 nm range. “On wafer” hot plate resonance frequency vs. temperature measurements were performed in the 20-150°C temperature range. Further measurements have been performed in the -268-+150°C temperature range, using a cryostat setup. The sensitivities obtained demonstrate the advantage of GaN SAW resonators as temperature sensors." @default.
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- W2078786330 date "2014-06-01" @default.
- W2078786330 modified "2023-09-29" @default.
- W2078786330 title "GaN-based SAW structures resonating within the 5.4–8.5 GHz frequency range, for high sensitivity temperature sensors" @default.
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- W2078786330 doi "https://doi.org/10.1109/mwsym.2014.6848483" @default.
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