FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2078797336> ?p ?o ?g. }

• W2078797336 abstract "We investigate in-situ cleaning of GaSb surfaces and its effect on the electrical performance of p-type GaSb metal-oxide-semiconductor capacitor (MOSCAP) using a remote hydrogen plasma. Ultrathin HfO2 films grown by atomic layer deposition were used as a high permittivity gate dielectric. Compared to conventional ex-situ chemical cleaning methods, the in-situ GaSb surface treatment resulted in a drastic improvement in the impedance characteristics of the MOSCAPs, directly evidencing a much lower interface trap density and enhanced Fermi level movement efficiency. We demonstrate that by using a combination of ex-situ and in-situ surface cleaning steps, aggressively scaled HfO2/p-GaSb MOSCAP structures with a low equivalent oxide thickness of 0.8 nm and efficient gate modulation of the surface potential are achieved, allowing to push the Fermi level far away from the valence band edge high up into the band gap of GaSb." @default.
• W2078797336 created "2016-06-24" @default.
• W2078797336 creator A5020002554 @default.
• W2078797336 creator A5026061865 @default.
• W2078797336 creator A5036105393 @default.
• W2078797336 creator A5037123634 @default.
• W2078797336 creator A5051699358 @default.
• W2078797336 creator A5057337622 @default.
• W2078797336 creator A5081690749 @default.
• W2078797336 date "2014-12-01" @default.
• W2078797336 modified "2023-09-23" @default.
• W2078797336 title "High quality HfO2/p-GaSb(001) metal-oxide-semiconductor capacitors with 0.8 nm equivalent oxide thickness" @default.
• W2078797336 cites W1483260153 @default.
• W2078797336 cites W1582697008 @default.
• W2078797336 cites W1650491160 @default.
• W2078797336 cites W1981649837 @default.
• W2078797336 cites W1985241024 @default.
• W2078797336 cites W2002222512 @default.
• W2078797336 cites W2002973902 @default.
• W2078797336 cites W2007394378 @default.
• W2078797336 cites W2013923068 @default.
• W2078797336 cites W2017219557 @default.
• W2078797336 cites W2020218264 @default.
• W2078797336 cites W2023636247 @default.
• W2078797336 cites W2033787863 @default.
• W2078797336 cites W2034583120 @default.
• W2078797336 cites W2037423392 @default.
• W2078797336 cites W2042390810 @default.
• W2078797336 cites W2043023629 @default.
• W2078797336 cites W2054415255 @default.
• W2078797336 cites W2060412054 @default.
• W2078797336 cites W2063411014 @default.
• W2078797336 cites W2068367850 @default.
• W2078797336 cites W2088792911 @default.
• W2078797336 cites W2105357062 @default.
• W2078797336 cites W2142132415 @default.
• W2078797336 cites W2146623559 @default.
• W2078797336 doi "https://doi.org/10.1063/1.4903068" @default.
• W2078797336 hasPublicationYear "2014" @default.
• W2078797336 type Work @default.
• W2078797336 sameAs 2078797336 @default.
• W2078797336 citedByCount "20" @default.
• W2078797336 countsByYear W20787973362015 @default.
• W2078797336 countsByYear W20787973362016 @default.
• W2078797336 countsByYear W20787973362017 @default.
• W2078797336 countsByYear W20787973362018 @default.
• W2078797336 countsByYear W20787973362019 @default.
• W2078797336 countsByYear W20787973362022 @default.
• W2078797336 crossrefType "journal-article" @default.
• W2078797336 hasAuthorship W2078797336A5020002554 @default.
• W2078797336 hasAuthorship W2078797336A5026061865 @default.
• W2078797336 hasAuthorship W2078797336A5036105393 @default.
• W2078797336 hasAuthorship W2078797336A5037123634 @default.
• W2078797336 hasAuthorship W2078797336A5051699358 @default.
• W2078797336 hasAuthorship W2078797336A5057337622 @default.
• W2078797336 hasAuthorship W2078797336A5081690749 @default.
• W2078797336 hasConcept C108225325 @default.
• W2078797336 hasConcept C119599485 @default.
• W2078797336 hasConcept C121332964 @default.
• W2078797336 hasConcept C127413603 @default.
• W2078797336 hasConcept C133386390 @default.
• W2078797336 hasConcept C147120987 @default.
• W2078797336 hasConcept C16317505 @default.
• W2078797336 hasConcept C165801399 @default.
• W2078797336 hasConcept C168651791 @default.
• W2078797336 hasConcept C171250308 @default.
• W2078797336 hasConcept C172385210 @default.
• W2078797336 hasConcept C181966813 @default.
• W2078797336 hasConcept C191897082 @default.
• W2078797336 hasConcept C192562407 @default.
• W2078797336 hasConcept C2361726 @default.
• W2078797336 hasConcept C2779227376 @default.
• W2078797336 hasConcept C2779851234 @default.
• W2078797336 hasConcept C40636707 @default.
• W2078797336 hasConcept C49040817 @default.
• W2078797336 hasConcept C52192207 @default.
• W2078797336 hasConcept C52780932 @default.
• W2078797336 hasConcept C62520636 @default.
• W2078797336 hasConcept C69544855 @default.
• W2078797336 hasConceptScore W2078797336C108225325 @default.
• W2078797336 hasConceptScore W2078797336C119599485 @default.
• W2078797336 hasConceptScore W2078797336C121332964 @default.
• W2078797336 hasConceptScore W2078797336C127413603 @default.
• W2078797336 hasConceptScore W2078797336C133386390 @default.
• W2078797336 hasConceptScore W2078797336C147120987 @default.
• W2078797336 hasConceptScore W2078797336C16317505 @default.
• W2078797336 hasConceptScore W2078797336C165801399 @default.
• W2078797336 hasConceptScore W2078797336C168651791 @default.
• W2078797336 hasConceptScore W2078797336C171250308 @default.
• W2078797336 hasConceptScore W2078797336C172385210 @default.
• W2078797336 hasConceptScore W2078797336C181966813 @default.
• W2078797336 hasConceptScore W2078797336C191897082 @default.
• W2078797336 hasConceptScore W2078797336C192562407 @default.
• W2078797336 hasConceptScore W2078797336C2361726 @default.
• W2078797336 hasConceptScore W2078797336C2779227376 @default.
• W2078797336 hasConceptScore W2078797336C2779851234 @default.
• W2078797336 hasConceptScore W2078797336C40636707 @default.
• W2078797336 hasConceptScore W2078797336C49040817 @default.
• W2078797336 hasConceptScore W2078797336C52192207 @default.
• W2078797336 hasConceptScore W2078797336C52780932 @default.

• next