Matches in SemOpenAlex for { <https://semopenalex.org/work/W2078804965> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2078804965 endingPage "254" @default.
- W2078804965 startingPage "251" @default.
- W2078804965 abstract "The processes of defect formation in silicon following high-energy ion implantation were studied using the Hall effect and IR absorption spectroscopy. Point radiation defects were found far beyond the region of typical ion projected ranges. It is suggested that the defects were formed as a result of diffusion of interstitials and vacancies from the implanted region further into the substrate. The efficiency of the formation of these defects was found to decrease with increase of the mass of implanted ions and is thought to be related to the increase in concentration of the interstitial and vacancy traps." @default.
- W2078804965 created "2016-06-24" @default.
- W2078804965 creator A5018414000 @default.
- W2078804965 creator A5030141791 @default.
- W2078804965 creator A5036611400 @default.
- W2078804965 creator A5056833095 @default.
- W2078804965 date "2005-05-01" @default.
- W2078804965 modified "2023-09-24" @default.
- W2078804965 title "Formation of radiation defects in silicon at high-energy implantation" @default.
- W2078804965 cites W2051625860 @default.
- W2078804965 cites W2057614609 @default.
- W2078804965 cites W4298364956 @default.
- W2078804965 doi "https://doi.org/10.1016/j.vacuum.2005.01.035" @default.
- W2078804965 hasPublicationYear "2005" @default.
- W2078804965 type Work @default.
- W2078804965 sameAs 2078804965 @default.
- W2078804965 citedByCount "2" @default.
- W2078804965 countsByYear W20788049652022 @default.
- W2078804965 crossrefType "journal-article" @default.
- W2078804965 hasAuthorship W2078804965A5018414000 @default.
- W2078804965 hasAuthorship W2078804965A5030141791 @default.
- W2078804965 hasAuthorship W2078804965A5036611400 @default.
- W2078804965 hasAuthorship W2078804965A5056833095 @default.
- W2078804965 hasConcept C111337013 @default.
- W2078804965 hasConcept C111368507 @default.
- W2078804965 hasConcept C114221277 @default.
- W2078804965 hasConcept C120665830 @default.
- W2078804965 hasConcept C121332964 @default.
- W2078804965 hasConcept C125287762 @default.
- W2078804965 hasConcept C127313418 @default.
- W2078804965 hasConcept C145148216 @default.
- W2078804965 hasConcept C153385146 @default.
- W2078804965 hasConcept C159985019 @default.
- W2078804965 hasConcept C164675345 @default.
- W2078804965 hasConcept C178790620 @default.
- W2078804965 hasConcept C184779094 @default.
- W2078804965 hasConcept C185544564 @default.
- W2078804965 hasConcept C185592680 @default.
- W2078804965 hasConcept C192562407 @default.
- W2078804965 hasConcept C2777289219 @default.
- W2078804965 hasConcept C2780080961 @default.
- W2078804965 hasConcept C41823505 @default.
- W2078804965 hasConcept C49040817 @default.
- W2078804965 hasConcept C544956773 @default.
- W2078804965 hasConcept C69357855 @default.
- W2078804965 hasConcept C8010536 @default.
- W2078804965 hasConcept C97355855 @default.
- W2078804965 hasConceptScore W2078804965C111337013 @default.
- W2078804965 hasConceptScore W2078804965C111368507 @default.
- W2078804965 hasConceptScore W2078804965C114221277 @default.
- W2078804965 hasConceptScore W2078804965C120665830 @default.
- W2078804965 hasConceptScore W2078804965C121332964 @default.
- W2078804965 hasConceptScore W2078804965C125287762 @default.
- W2078804965 hasConceptScore W2078804965C127313418 @default.
- W2078804965 hasConceptScore W2078804965C145148216 @default.
- W2078804965 hasConceptScore W2078804965C153385146 @default.
- W2078804965 hasConceptScore W2078804965C159985019 @default.
- W2078804965 hasConceptScore W2078804965C164675345 @default.
- W2078804965 hasConceptScore W2078804965C178790620 @default.
- W2078804965 hasConceptScore W2078804965C184779094 @default.
- W2078804965 hasConceptScore W2078804965C185544564 @default.
- W2078804965 hasConceptScore W2078804965C185592680 @default.
- W2078804965 hasConceptScore W2078804965C192562407 @default.
- W2078804965 hasConceptScore W2078804965C2777289219 @default.
- W2078804965 hasConceptScore W2078804965C2780080961 @default.
- W2078804965 hasConceptScore W2078804965C41823505 @default.
- W2078804965 hasConceptScore W2078804965C49040817 @default.
- W2078804965 hasConceptScore W2078804965C544956773 @default.
- W2078804965 hasConceptScore W2078804965C69357855 @default.
- W2078804965 hasConceptScore W2078804965C8010536 @default.
- W2078804965 hasConceptScore W2078804965C97355855 @default.
- W2078804965 hasIssue "2-4" @default.
- W2078804965 hasLocation W20788049651 @default.
- W2078804965 hasOpenAccess W2078804965 @default.
- W2078804965 hasPrimaryLocation W20788049651 @default.
- W2078804965 hasRelatedWork W1969656731 @default.
- W2078804965 hasRelatedWork W1976994971 @default.
- W2078804965 hasRelatedWork W1996998216 @default.
- W2078804965 hasRelatedWork W2035709483 @default.
- W2078804965 hasRelatedWork W2040530268 @default.
- W2078804965 hasRelatedWork W2047837041 @default.
- W2078804965 hasRelatedWork W2078140681 @default.
- W2078804965 hasRelatedWork W2078804965 @default.
- W2078804965 hasRelatedWork W2087168628 @default.
- W2078804965 hasRelatedWork W3136236470 @default.
- W2078804965 hasVolume "78" @default.
- W2078804965 isParatext "false" @default.
- W2078804965 isRetracted "false" @default.
- W2078804965 magId "2078804965" @default.
- W2078804965 workType "article" @default.