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- W2078902691 abstract "As the minimum feature size of electronic devices continues to shrink, the industry is moving from wavelength of 248-nm KrF excimer laser sources to shorter wavelength of 193-nrn ArF excimer laser and ArF immersion to achieve required higher resolution. As minimum feature sizes are reduced, the ability to minimize defects is getting more important, because they have a close connection with yield. With the replacement of laser source, 248-nm with 193-nm, the platform of polymer was also converted from phenolic polymer into acrylic polymer. With this platform changes unexpected various defect problems had been occurred. Although KrF process causes not much of defect, ArF process causes more serious defect problems. One of those major defect source is solidification of polymer in track nozzle. The solidified polymer at track nozzle needs to be removed periodically, unless it causes significant throughput loss in mass production. The amount of this type of defect relies on physical properties of polymer platform such as hydrophilicity, solubility or structural rigidity. The hydrophilic phenol based KrF polymer shows minor defects, contrarily hydrophobic acryl based ArF polymer causes serious defects. The solidification of acrylate type polymer was caused by poor solubility. In order to improve solubility, olefinic moieties such as norbornylene, norbornyl devertives and opened maleic anhydride monomers were adopted in acrylate polymer. Those inserted olefins and opened maleic anhydride in acrylic polymer changed overall structure such as rigid helix structure into flexible structure. With the increase of solubility, particle defect was dramatically reduced. Conclusively, insertion of cycloolefin and opened maleic anhydride moiety releases rigid acrylic structure and it improves solubility. As solubility improves, crystallization at nozzle has been decreased and the particle defect is reduced. Moreover this flexible structure allows the resist reflow at the moderate temperature which is one of the resolution enhancement techniques." @default.
- W2078902691 created "2016-06-24" @default.
- W2078902691 creator A5023315900 @default.
- W2078902691 creator A5033593808 @default.
- W2078902691 creator A5037384395 @default.
- W2078902691 creator A5038578797 @default.
- W2078902691 creator A5038644630 @default.
- W2078902691 creator A5040569874 @default.
- W2078902691 creator A5057746028 @default.
- W2078902691 creator A5061287351 @default.
- W2078902691 creator A5068434200 @default.
- W2078902691 creator A5077019539 @default.
- W2078902691 creator A5079797373 @default.
- W2078902691 creator A5086318101 @default.
- W2078902691 date "2006-03-10" @default.
- W2078902691 modified "2023-10-17" @default.
- W2078902691 title "Correlation between polymer platform of ArF photoresist and defect in the track nozzle of manufacturing process line" @default.
- W2078902691 doi "https://doi.org/10.1117/12.657072" @default.
- W2078902691 hasPublicationYear "2006" @default.
- W2078902691 type Work @default.
- W2078902691 sameAs 2078902691 @default.
- W2078902691 citedByCount "0" @default.
- W2078902691 crossrefType "proceedings-article" @default.
- W2078902691 hasAuthorship W2078902691A5023315900 @default.
- W2078902691 hasAuthorship W2078902691A5033593808 @default.
- W2078902691 hasAuthorship W2078902691A5037384395 @default.
- W2078902691 hasAuthorship W2078902691A5038578797 @default.
- W2078902691 hasAuthorship W2078902691A5038644630 @default.
- W2078902691 hasAuthorship W2078902691A5040569874 @default.
- W2078902691 hasAuthorship W2078902691A5057746028 @default.
- W2078902691 hasAuthorship W2078902691A5061287351 @default.
- W2078902691 hasAuthorship W2078902691A5068434200 @default.
- W2078902691 hasAuthorship W2078902691A5077019539 @default.
- W2078902691 hasAuthorship W2078902691A5079797373 @default.
- W2078902691 hasAuthorship W2078902691A5086318101 @default.
- W2078902691 hasConcept C120665830 @default.
- W2078902691 hasConcept C121332964 @default.
- W2078902691 hasConcept C127413603 @default.
- W2078902691 hasConcept C134406635 @default.
- W2078902691 hasConcept C155574463 @default.
- W2078902691 hasConcept C15920480 @default.
- W2078902691 hasConcept C159985019 @default.
- W2078902691 hasConcept C166940927 @default.
- W2078902691 hasConcept C178790620 @default.
- W2078902691 hasConcept C185592680 @default.
- W2078902691 hasConcept C188027245 @default.
- W2078902691 hasConcept C192562407 @default.
- W2078902691 hasConcept C2777666793 @default.
- W2078902691 hasConcept C2779227376 @default.
- W2078902691 hasConcept C2779989194 @default.
- W2078902691 hasConcept C2780477314 @default.
- W2078902691 hasConcept C42360764 @default.
- W2078902691 hasConcept C520434653 @default.
- W2078902691 hasConcept C521977710 @default.
- W2078902691 hasConcept C74561354 @default.
- W2078902691 hasConceptScore W2078902691C120665830 @default.
- W2078902691 hasConceptScore W2078902691C121332964 @default.
- W2078902691 hasConceptScore W2078902691C127413603 @default.
- W2078902691 hasConceptScore W2078902691C134406635 @default.
- W2078902691 hasConceptScore W2078902691C155574463 @default.
- W2078902691 hasConceptScore W2078902691C15920480 @default.
- W2078902691 hasConceptScore W2078902691C159985019 @default.
- W2078902691 hasConceptScore W2078902691C166940927 @default.
- W2078902691 hasConceptScore W2078902691C178790620 @default.
- W2078902691 hasConceptScore W2078902691C185592680 @default.
- W2078902691 hasConceptScore W2078902691C188027245 @default.
- W2078902691 hasConceptScore W2078902691C192562407 @default.
- W2078902691 hasConceptScore W2078902691C2777666793 @default.
- W2078902691 hasConceptScore W2078902691C2779227376 @default.
- W2078902691 hasConceptScore W2078902691C2779989194 @default.
- W2078902691 hasConceptScore W2078902691C2780477314 @default.
- W2078902691 hasConceptScore W2078902691C42360764 @default.
- W2078902691 hasConceptScore W2078902691C520434653 @default.
- W2078902691 hasConceptScore W2078902691C521977710 @default.
- W2078902691 hasConceptScore W2078902691C74561354 @default.
- W2078902691 hasLocation W20789026911 @default.
- W2078902691 hasOpenAccess W2078902691 @default.
- W2078902691 hasPrimaryLocation W20789026911 @default.
- W2078902691 hasRelatedWork W2038049004 @default.
- W2078902691 hasRelatedWork W2060700572 @default.
- W2078902691 hasRelatedWork W2065062271 @default.
- W2078902691 hasRelatedWork W2068201628 @default.
- W2078902691 hasRelatedWork W2082489692 @default.
- W2078902691 hasRelatedWork W2089267761 @default.
- W2078902691 hasRelatedWork W2121842181 @default.
- W2078902691 hasRelatedWork W2415424868 @default.
- W2078902691 hasRelatedWork W3147016100 @default.
- W2078902691 hasRelatedWork W4233732104 @default.
- W2078902691 isParatext "false" @default.
- W2078902691 isRetracted "false" @default.
- W2078902691 magId "2078902691" @default.
- W2078902691 workType "article" @default.