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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2078921161> ?p ?o ?g. }

• W2078921161 endingPage "814" @default.
• W2078921161 startingPage "804" @default.
• W2078921161 abstract "Abstract This paper discusses the deposition of thin films of silicon oxides, nitrides and oxynitrides by the relatively new technique of remote plasma-enhanced chemical vapor deposition, or RPECVD. This process uses a silane-based reaction chemistry that is qualitatively different from the direct PECVD techniques that are more commonly employed. In this paper, we discuss those aspects of the RPECVD deposition process gas-phase and surface chemistry that ensure the growth of stoichiometric, hydrogen-free films at relatively low substrate temperatures (100 to 300°C). In this context, we highlight the results of IR measurements that give direct information relative to stoichiometry and hydrogen atom incorporation. We consider the applications of these silicon-based dielectrics in II–VI device structures, and in particular focus on the importance of semiconductor surface preparation prior to film deposition. Finally, we also discuss the properties of these films in device structures utilizing crystalline Si, Ge and (In, Ga)As and then present the results of our initial studies of dielectric film deposition onto CdTe surfaces." @default.
• W2078921161 created "2016-06-24" @default.
• W2078921161 creator A5003510454 @default.
• W2078921161 creator A5061924957 @default.
• W2078921161 date "1988-01-01" @default.
• W2078921161 modified "2023-09-25" @default.
• W2078921161 title "Deposition of silicon-based dielectrics by remote plasma-enhanced chemical vapor deposition" @default.
• W2078921161 cites W1981492282 @default.
• W2078921161 cites W1983718141 @default.
• W2078921161 cites W1984760422 @default.
• W2078921161 cites W1984803626 @default.
• W2078921161 cites W1998724083 @default.
• W2078921161 cites W2008336411 @default.
• W2078921161 cites W2010648620 @default.
• W2078921161 cites W2033185055 @default.
• W2078921161 cites W2056582154 @default.
• W2078921161 cites W2062481960 @default.
• W2078921161 cites W2085566738 @default.
• W2078921161 cites W2088806214 @default.
• W2078921161 cites W95565472 @default.
• W2078921161 cites W2032583954 @default.
• W2078921161 doi "https://doi.org/10.1016/0022-0248(90)90808-x" @default.
• W2078921161 hasPublicationYear "1988" @default.
• W2078921161 type Work @default.
• W2078921161 sameAs 2078921161 @default.
• W2078921161 citedByCount "19" @default.
• W2078921161 countsByYear W20789211612022 @default.
• W2078921161 crossrefType "journal-article" @default.
• W2078921161 hasAuthorship W2078921161A5003510454 @default.
• W2078921161 hasAuthorship W2078921161A5061924957 @default.
• W2078921161 hasConcept C107872376 @default.
• W2078921161 hasConcept C113196181 @default.
• W2078921161 hasConcept C121332964 @default.
• W2078921161 hasConcept C127313418 @default.
• W2078921161 hasConcept C127413603 @default.
• W2078921161 hasConcept C133386390 @default.
• W2078921161 hasConcept C145738678 @default.
• W2078921161 hasConcept C151730666 @default.
• W2078921161 hasConcept C171250308 @default.
• W2078921161 hasConcept C183866003 @default.
• W2078921161 hasConcept C185592680 @default.
• W2078921161 hasConcept C19067145 @default.
• W2078921161 hasConcept C192562407 @default.
• W2078921161 hasConcept C199289684 @default.
• W2078921161 hasConcept C2780740191 @default.
• W2078921161 hasConcept C2816523 @default.
• W2078921161 hasConcept C38347018 @default.
• W2078921161 hasConcept C42360764 @default.
• W2078921161 hasConcept C49040817 @default.
• W2078921161 hasConcept C544956773 @default.
• W2078921161 hasConcept C57410435 @default.
• W2078921161 hasConcept C62520636 @default.
• W2078921161 hasConcept C64297162 @default.
• W2078921161 hasConcept C75937256 @default.
• W2078921161 hasConcept C82706917 @default.
• W2078921161 hasConceptScore W2078921161C107872376 @default.
• W2078921161 hasConceptScore W2078921161C113196181 @default.
• W2078921161 hasConceptScore W2078921161C121332964 @default.
• W2078921161 hasConceptScore W2078921161C127313418 @default.
• W2078921161 hasConceptScore W2078921161C127413603 @default.
• W2078921161 hasConceptScore W2078921161C133386390 @default.
• W2078921161 hasConceptScore W2078921161C145738678 @default.
• W2078921161 hasConceptScore W2078921161C151730666 @default.
• W2078921161 hasConceptScore W2078921161C171250308 @default.
• W2078921161 hasConceptScore W2078921161C183866003 @default.
• W2078921161 hasConceptScore W2078921161C185592680 @default.
• W2078921161 hasConceptScore W2078921161C19067145 @default.
• W2078921161 hasConceptScore W2078921161C192562407 @default.
• W2078921161 hasConceptScore W2078921161C199289684 @default.
• W2078921161 hasConceptScore W2078921161C2780740191 @default.
• W2078921161 hasConceptScore W2078921161C2816523 @default.
• W2078921161 hasConceptScore W2078921161C38347018 @default.
• W2078921161 hasConceptScore W2078921161C42360764 @default.
• W2078921161 hasConceptScore W2078921161C49040817 @default.
• W2078921161 hasConceptScore W2078921161C544956773 @default.
• W2078921161 hasConceptScore W2078921161C57410435 @default.
• W2078921161 hasConceptScore W2078921161C62520636 @default.
• W2078921161 hasConceptScore W2078921161C64297162 @default.
• W2078921161 hasConceptScore W2078921161C75937256 @default.
• W2078921161 hasConceptScore W2078921161C82706917 @default.
• W2078921161 hasIssue "1-4" @default.
• W2078921161 hasLocation W20789211611 @default.
• W2078921161 hasOpenAccess W2078921161 @default.
• W2078921161 hasPrimaryLocation W20789211611 @default.
• W2078921161 hasRelatedWork W1971984726 @default.
• W2078921161 hasRelatedWork W1994864589 @default.
• W2078921161 hasRelatedWork W2026736255 @default.
• W2078921161 hasRelatedWork W2064844593 @default.
• W2078921161 hasRelatedWork W2155238555 @default.
• W2078921161 hasRelatedWork W2162701931 @default.
• W2078921161 hasRelatedWork W2312852125 @default.
• W2078921161 hasRelatedWork W2753114548 @default.
• W2078921161 hasRelatedWork W3134004627 @default.
• W2078921161 hasRelatedWork W3150710940 @default.
• W2078921161 hasVolume "86" @default.
• W2078921161 isParatext "false" @default.
• W2078921161 isRetracted "false" @default.
• W2078921161 magId "2078921161" @default.

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