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- W2078934818 endingPage "748" @default.
- W2078934818 startingPage "746" @default.
- W2078934818 abstract "Polycrystalline silicon films deposited on silicon dioxide were partially amorphized by implantation with 100 keV gallium ions to a dose of 6×1015 cm−2. These films were then subjected to various heat treatments at 580 and 900 °C using conventional furnace or rapid thermal heating techniques. Sudden drops in sheet resistance occurred at lower temperatures with little change upon further heating. However, the high-temperature annealed specimen shows only an increase in sheet resistance with time. An explanation of these changes is proposed in terms of a liquid phase melting mechanism taking place during the crystallization of the amorphized near-surface layer. Transmission electron microscopy and Rutherford backscattering observations support this explanation." @default.
- W2078934818 created "2016-06-24" @default.
- W2078934818 creator A5024079093 @default.
- W2078934818 creator A5026717374 @default.
- W2078934818 creator A5043941117 @default.
- W2078934818 creator A5080715381 @default.
- W2078934818 date "1988-08-29" @default.
- W2078934818 modified "2023-09-24" @default.
- W2078934818 title "Effect of heat treatment on the properties of gallium-implanted polycrystalline silicon" @default.
- W2078934818 cites W1971645856 @default.
- W2078934818 cites W2054858723 @default.
- W2078934818 cites W2083131949 @default.
- W2078934818 doi "https://doi.org/10.1063/1.99820" @default.
- W2078934818 hasPublicationYear "1988" @default.
- W2078934818 type Work @default.
- W2078934818 sameAs 2078934818 @default.
- W2078934818 citedByCount "3" @default.
- W2078934818 crossrefType "journal-article" @default.
- W2078934818 hasAuthorship W2078934818A5024079093 @default.
- W2078934818 hasAuthorship W2078934818A5026717374 @default.
- W2078934818 hasAuthorship W2078934818A5043941117 @default.
- W2078934818 hasAuthorship W2078934818A5080715381 @default.
- W2078934818 hasBestOaLocation W20789348181 @default.
- W2078934818 hasConcept C113196181 @default.
- W2078934818 hasConcept C137637335 @default.
- W2078934818 hasConcept C145148216 @default.
- W2078934818 hasConcept C146088050 @default.
- W2078934818 hasConcept C159985019 @default.
- W2078934818 hasConcept C171250308 @default.
- W2078934818 hasConcept C178790620 @default.
- W2078934818 hasConcept C185592680 @default.
- W2078934818 hasConcept C191897082 @default.
- W2078934818 hasConcept C192562407 @default.
- W2078934818 hasConcept C197751951 @default.
- W2078934818 hasConcept C203036418 @default.
- W2078934818 hasConcept C2777855556 @default.
- W2078934818 hasConcept C2779227376 @default.
- W2078934818 hasConcept C2780565262 @default.
- W2078934818 hasConcept C41823505 @default.
- W2078934818 hasConcept C43617362 @default.
- W2078934818 hasConcept C544956773 @default.
- W2078934818 hasConcept C550372918 @default.
- W2078934818 hasConcept C66825105 @default.
- W2078934818 hasConcept C87359718 @default.
- W2078934818 hasConceptScore W2078934818C113196181 @default.
- W2078934818 hasConceptScore W2078934818C137637335 @default.
- W2078934818 hasConceptScore W2078934818C145148216 @default.
- W2078934818 hasConceptScore W2078934818C146088050 @default.
- W2078934818 hasConceptScore W2078934818C159985019 @default.
- W2078934818 hasConceptScore W2078934818C171250308 @default.
- W2078934818 hasConceptScore W2078934818C178790620 @default.
- W2078934818 hasConceptScore W2078934818C185592680 @default.
- W2078934818 hasConceptScore W2078934818C191897082 @default.
- W2078934818 hasConceptScore W2078934818C192562407 @default.
- W2078934818 hasConceptScore W2078934818C197751951 @default.
- W2078934818 hasConceptScore W2078934818C203036418 @default.
- W2078934818 hasConceptScore W2078934818C2777855556 @default.
- W2078934818 hasConceptScore W2078934818C2779227376 @default.
- W2078934818 hasConceptScore W2078934818C2780565262 @default.
- W2078934818 hasConceptScore W2078934818C41823505 @default.
- W2078934818 hasConceptScore W2078934818C43617362 @default.
- W2078934818 hasConceptScore W2078934818C544956773 @default.
- W2078934818 hasConceptScore W2078934818C550372918 @default.
- W2078934818 hasConceptScore W2078934818C66825105 @default.
- W2078934818 hasConceptScore W2078934818C87359718 @default.
- W2078934818 hasIssue "9" @default.
- W2078934818 hasLocation W20789348181 @default.
- W2078934818 hasOpenAccess W2078934818 @default.
- W2078934818 hasPrimaryLocation W20789348181 @default.
- W2078934818 hasRelatedWork W1969656731 @default.
- W2078934818 hasRelatedWork W1976261375 @default.
- W2078934818 hasRelatedWork W1989439426 @default.
- W2078934818 hasRelatedWork W2002327997 @default.
- W2078934818 hasRelatedWork W2030673391 @default.
- W2078934818 hasRelatedWork W2042925312 @default.
- W2078934818 hasRelatedWork W2065258228 @default.
- W2078934818 hasRelatedWork W2078934818 @default.
- W2078934818 hasRelatedWork W2094221410 @default.
- W2078934818 hasRelatedWork W2135394413 @default.
- W2078934818 hasVolume "53" @default.
- W2078934818 isParatext "false" @default.
- W2078934818 isRetracted "false" @default.
- W2078934818 magId "2078934818" @default.
- W2078934818 workType "article" @default.