Matches in SemOpenAlex for { <https://semopenalex.org/work/W2078935061> ?p ?o ?g. }
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99
with 100 items per page.
- W2078935061 endingPage "7277" @default.
- W2078935061 startingPage "7274" @default.
- W2078935061 abstract "A high-rate a-Si:H film deposition using the new plasma–chemical gas jet method with electron beam activation has been developed. The films were characterized by ellipsometry, IR-spectrometry, and electrophysical measurements. Comparison of the film characteristics with those obtained by Hichikawa et al., J. Appl. Phys. 73, 4227 (1993), in the usual planar technology has demonstrated satisfactory film quality with a growth rate of films an order of magnitude greater than the rates in a planar reactor." @default.
- W2078935061 created "2016-06-24" @default.
- W2078935061 creator A5002010671 @default.
- W2078935061 creator A5009102691 @default.
- W2078935061 creator A5012276661 @default.
- W2078935061 creator A5014471747 @default.
- W2078935061 creator A5053165446 @default.
- W2078935061 creator A5060606486 @default.
- W2078935061 creator A5066807329 @default.
- W2078935061 creator A5081086112 @default.
- W2078935061 creator A5087339421 @default.
- W2078935061 date "1996-05-01" @default.
- W2078935061 modified "2023-09-24" @default.
- W2078935061 title "High‐rate deposition of a‐Si:H films using a flow plasma–chemical method with electron beam activation" @default.
- W2078935061 cites W1893431897 @default.
- W2078935061 cites W2030846058 @default.
- W2078935061 cites W2042884947 @default.
- W2078935061 cites W2043825332 @default.
- W2078935061 cites W2091870899 @default.
- W2078935061 cites W2094264215 @default.
- W2078935061 doi "https://doi.org/10.1063/1.361444" @default.
- W2078935061 hasPublicationYear "1996" @default.
- W2078935061 type Work @default.
- W2078935061 sameAs 2078935061 @default.
- W2078935061 citedByCount "18" @default.
- W2078935061 countsByYear W20789350612012 @default.
- W2078935061 crossrefType "journal-article" @default.
- W2078935061 hasAuthorship W2078935061A5002010671 @default.
- W2078935061 hasAuthorship W2078935061A5009102691 @default.
- W2078935061 hasAuthorship W2078935061A5012276661 @default.
- W2078935061 hasAuthorship W2078935061A5014471747 @default.
- W2078935061 hasAuthorship W2078935061A5053165446 @default.
- W2078935061 hasAuthorship W2078935061A5060606486 @default.
- W2078935061 hasAuthorship W2078935061A5066807329 @default.
- W2078935061 hasAuthorship W2078935061A5081086112 @default.
- W2078935061 hasAuthorship W2078935061A5087339421 @default.
- W2078935061 hasConcept C113196181 @default.
- W2078935061 hasConcept C121332964 @default.
- W2078935061 hasConcept C121684516 @default.
- W2078935061 hasConcept C134786449 @default.
- W2078935061 hasConcept C147120987 @default.
- W2078935061 hasConcept C151730666 @default.
- W2078935061 hasConcept C171250308 @default.
- W2078935061 hasConcept C172120300 @default.
- W2078935061 hasConcept C18293161 @default.
- W2078935061 hasConcept C185592680 @default.
- W2078935061 hasConcept C19067145 @default.
- W2078935061 hasConcept C192562407 @default.
- W2078935061 hasConcept C2816523 @default.
- W2078935061 hasConcept C41008148 @default.
- W2078935061 hasConcept C43617362 @default.
- W2078935061 hasConcept C62520636 @default.
- W2078935061 hasConcept C64297162 @default.
- W2078935061 hasConcept C82706917 @default.
- W2078935061 hasConcept C86803240 @default.
- W2078935061 hasConcept C95312477 @default.
- W2078935061 hasConcept C97355855 @default.
- W2078935061 hasConceptScore W2078935061C113196181 @default.
- W2078935061 hasConceptScore W2078935061C121332964 @default.
- W2078935061 hasConceptScore W2078935061C121684516 @default.
- W2078935061 hasConceptScore W2078935061C134786449 @default.
- W2078935061 hasConceptScore W2078935061C147120987 @default.
- W2078935061 hasConceptScore W2078935061C151730666 @default.
- W2078935061 hasConceptScore W2078935061C171250308 @default.
- W2078935061 hasConceptScore W2078935061C172120300 @default.
- W2078935061 hasConceptScore W2078935061C18293161 @default.
- W2078935061 hasConceptScore W2078935061C185592680 @default.
- W2078935061 hasConceptScore W2078935061C19067145 @default.
- W2078935061 hasConceptScore W2078935061C192562407 @default.
- W2078935061 hasConceptScore W2078935061C2816523 @default.
- W2078935061 hasConceptScore W2078935061C41008148 @default.
- W2078935061 hasConceptScore W2078935061C43617362 @default.
- W2078935061 hasConceptScore W2078935061C62520636 @default.
- W2078935061 hasConceptScore W2078935061C64297162 @default.
- W2078935061 hasConceptScore W2078935061C82706917 @default.
- W2078935061 hasConceptScore W2078935061C86803240 @default.
- W2078935061 hasConceptScore W2078935061C95312477 @default.
- W2078935061 hasConceptScore W2078935061C97355855 @default.
- W2078935061 hasIssue "9" @default.
- W2078935061 hasLocation W20789350611 @default.
- W2078935061 hasOpenAccess W2078935061 @default.
- W2078935061 hasPrimaryLocation W20789350611 @default.
- W2078935061 hasRelatedWork W1784264260 @default.
- W2078935061 hasRelatedWork W1989266634 @default.
- W2078935061 hasRelatedWork W2024853244 @default.
- W2078935061 hasRelatedWork W2044530895 @default.
- W2078935061 hasRelatedWork W2061022438 @default.
- W2078935061 hasRelatedWork W2062634013 @default.
- W2078935061 hasRelatedWork W2066727007 @default.
- W2078935061 hasRelatedWork W2095282691 @default.
- W2078935061 hasRelatedWork W2386027266 @default.
- W2078935061 hasRelatedWork W2528742910 @default.
- W2078935061 hasVolume "79" @default.
- W2078935061 isParatext "false" @default.
- W2078935061 isRetracted "false" @default.
- W2078935061 magId "2078935061" @default.
- W2078935061 workType "article" @default.