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- W2078968625 abstract "Large-scale mirror plays an important role in the field of science and technology. Just because of shortcomings of traditional materials, silicon carbide is tending to be the most potential material for large-scale mirror. Large-scale mirror is fabricated by three steps. The first step includes design and analysis of mirror. The second step is the preparation of mirror. The third step is machining, polishing and coatings. Some mirrors with sizes from 100 mm to 1m were prepared. The roughness is less than 3 nm rms. The wave-front error can be less than 1/40 wavelength rms. The reflectivity of the mirrors with Ag films is larger than 95%. In order to obtain smoother surface, a dense coatings with single phase material should be prepared. In this paper, silicon coatings were prepared by electronic beam physical vapor deposition and magnetron sputtering. The properties of coatings-substrate system were tested. The adherence strength of silicon coatings by electronic beam physical vapor deposition is between 15~20 g, and porosity is about 6%, and the adherence strength of silicon coatings by magnetron sputtering is between 20~40 g, and porosity is less than 2%. The silicon coatings by magnetron sputtering can be polished to a smooth surface. Some silicon carbide mirrors were prepared for the large pointer mirror and the primary mirror of the high resolution camera. Currently, experiments are under way to test the properties under the simulation space situation." @default.
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- W2078968625 date "2007-12-03" @default.
- W2078968625 modified "2023-10-16" @default.
- W2078968625 title "Design and fabrication of large-scale RB-SiC mirror" @default.
- W2078968625 doi "https://doi.org/10.1117/12.782952" @default.
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