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- W2078969095 abstract "A precision sliding guide is expatiated on. The experiment and calculation of the externally pressurized thrust gas-bearings used in air-guide are carried through, and its' technical difficulty are be solved through laser processing and cementing method. A detailed structure of friction driving device are presented and its' merits are analysed. The feasible feedback control system's scheme composed by the measure equipment of grating or laser interferometer are given and its theory are explained. And the error of the guiding are analyzed. it can be used in precision equipments." @default.
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- W2078969095 date "2010-06-01" @default.
- W2078969095 modified "2023-09-26" @default.
- W2078969095 title "A structure and application of precision linar servo mechanism" @default.
- W2078969095 doi "https://doi.org/10.1109/mace.2010.5536008" @default.
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