Matches in SemOpenAlex for { <https://semopenalex.org/work/W2078970185> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2078970185 endingPage "562" @default.
- W2078970185 startingPage "553" @default.
- W2078970185 abstract "Abstract The effect of γ irradiation (10 6 –5×10 7 rad) on the electrical and dielectric properties of thin tantalum pentoxide layers obtained by two methods (rf sputtering and thermal oxidation) have been investigated. It is established that the irradiation degrades the characteristics of the layers in terms of dielectric constant, oxide charge and leakage current. At the same time the irradiation does not affect the breakdown fields significantly. The influence of radiation depends on both the dose and the initial quality of the layers including their thickness: the degradation is more severe for the higher dose and the thinner layers; the as-fabricated, non-annealed films show poor immunity to radiation damage. The main source of electrically active defects in irradiated films is associated with the oxygen vacancies and the broken Ta–O and Si–O bonds. It was established that the higher temperature oxidation or annealing in O 2 are more beneficial for the radiation hardness of Ta 2 O 5 , which seems to be due to more a perfect layer structure obtained at high temperature oxygen treatment." @default.
- W2078970185 created "2016-06-24" @default.
- W2078970185 creator A5012858693 @default.
- W2078970185 creator A5022212999 @default.
- W2078970185 creator A5022403657 @default.
- W2078970185 creator A5058722071 @default.
- W2078970185 creator A5083644327 @default.
- W2078970185 date "2001-07-01" @default.
- W2078970185 modified "2023-10-16" @default.
- W2078970185 title "Influence of γ radiation on thin Ta2O5–Si structures" @default.
- W2078970185 cites W1506823599 @default.
- W2078970185 cites W1976620497 @default.
- W2078970185 cites W1989915280 @default.
- W2078970185 cites W1994809675 @default.
- W2078970185 cites W1999774610 @default.
- W2078970185 cites W2003487622 @default.
- W2078970185 cites W2006578738 @default.
- W2078970185 cites W2038274823 @default.
- W2078970185 cites W2054894624 @default.
- W2078970185 cites W2055194432 @default.
- W2078970185 cites W2064085036 @default.
- W2078970185 cites W2069903680 @default.
- W2078970185 cites W2073540967 @default.
- W2078970185 cites W2078835500 @default.
- W2078970185 cites W2081846636 @default.
- W2078970185 cites W2086704085 @default.
- W2078970185 cites W2094021504 @default.
- W2078970185 cites W2122872447 @default.
- W2078970185 cites W2131797060 @default.
- W2078970185 cites W2972713638 @default.
- W2078970185 doi "https://doi.org/10.1016/s0026-2692(01)00043-x" @default.
- W2078970185 hasPublicationYear "2001" @default.
- W2078970185 type Work @default.
- W2078970185 sameAs 2078970185 @default.
- W2078970185 citedByCount "84" @default.
- W2078970185 countsByYear W20789701852012 @default.
- W2078970185 countsByYear W20789701852013 @default.
- W2078970185 countsByYear W20789701852014 @default.
- W2078970185 countsByYear W20789701852015 @default.
- W2078970185 countsByYear W20789701852016 @default.
- W2078970185 countsByYear W20789701852017 @default.
- W2078970185 countsByYear W20789701852018 @default.
- W2078970185 countsByYear W20789701852019 @default.
- W2078970185 countsByYear W20789701852020 @default.
- W2078970185 countsByYear W20789701852021 @default.
- W2078970185 countsByYear W20789701852022 @default.
- W2078970185 countsByYear W20789701852023 @default.
- W2078970185 crossrefType "journal-article" @default.
- W2078970185 hasAuthorship W2078970185A5012858693 @default.
- W2078970185 hasAuthorship W2078970185A5022212999 @default.
- W2078970185 hasAuthorship W2078970185A5022403657 @default.
- W2078970185 hasAuthorship W2078970185A5058722071 @default.
- W2078970185 hasAuthorship W2078970185A5083644327 @default.
- W2078970185 hasConcept C120665830 @default.
- W2078970185 hasConcept C121332964 @default.
- W2078970185 hasConcept C127413603 @default.
- W2078970185 hasConcept C153385146 @default.
- W2078970185 hasConcept C192562407 @default.
- W2078970185 hasConcept C49040817 @default.
- W2078970185 hasConcept C544956773 @default.
- W2078970185 hasConcept C61696701 @default.
- W2078970185 hasConceptScore W2078970185C120665830 @default.
- W2078970185 hasConceptScore W2078970185C121332964 @default.
- W2078970185 hasConceptScore W2078970185C127413603 @default.
- W2078970185 hasConceptScore W2078970185C153385146 @default.
- W2078970185 hasConceptScore W2078970185C192562407 @default.
- W2078970185 hasConceptScore W2078970185C49040817 @default.
- W2078970185 hasConceptScore W2078970185C544956773 @default.
- W2078970185 hasConceptScore W2078970185C61696701 @default.
- W2078970185 hasFunder F4320321843 @default.
- W2078970185 hasFunder F4320323573 @default.
- W2078970185 hasIssue "7" @default.
- W2078970185 hasLocation W20789701851 @default.
- W2078970185 hasOpenAccess W2078970185 @default.
- W2078970185 hasPrimaryLocation W20789701851 @default.
- W2078970185 hasRelatedWork W2077666430 @default.
- W2078970185 hasRelatedWork W2121524308 @default.
- W2078970185 hasRelatedWork W2139871202 @default.
- W2078970185 hasRelatedWork W2292675962 @default.
- W2078970185 hasRelatedWork W2312552982 @default.
- W2078970185 hasRelatedWork W2399397734 @default.
- W2078970185 hasRelatedWork W2460230608 @default.
- W2078970185 hasRelatedWork W2769410768 @default.
- W2078970185 hasRelatedWork W2902546961 @default.
- W2078970185 hasRelatedWork W3127524829 @default.
- W2078970185 hasVolume "32" @default.
- W2078970185 isParatext "false" @default.
- W2078970185 isRetracted "false" @default.
- W2078970185 magId "2078970185" @default.
- W2078970185 workType "article" @default.