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- W2078972402 abstract "Advantage and role of focused ion beam (FIB) for nanopatterning of the substrates toward the artificial control of self-assembly processes of semiconductor nanostructures are shown and discussed. Two-dimensional ZnO nanodot arrays well-ordered in size and position of the nanodots are demonstrated, for example, the nanodots with diameter of 130±10 and 18±5 nm were two dimensionally arrayed with periods of 750 and 100 nm, respectively. Gallium implanted in the FIB-nanopatterning is suggested as a plausible reason for the selective nucleation of ZnO nanodots on nanopatterned substrates." @default.
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- W2078972402 date "2004-12-01" @default.
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- W2078972402 title "Artificial control of ZnO nanostructures grown by metalorganic chemical vapor deposition" @default.
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- W2078972402 doi "https://doi.org/10.1016/j.jcrysgro.2004.08.078" @default.
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