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• W2078991087 endingPage "D26" @default.
• W2078991087 startingPage "D26" @default.
• W2078991087 abstract "Copper(I) amidinate was investigated to produce copper films in conventional low pressure chemical vapor deposition (CVD) using hydrogen as reducing gas-reagent. Copper films were deposited on steel, silicon, and substrates in the temperature range at a total pressure of . The growth rate on steel follows the surface reaction between atomic hydrogen and the entire precursor molecule up to . A significant increase of the growth rate at temperatures higher than was attributed to thermal decomposition of the precursor molecule. It is shown that meets the specifications for the metal organic chemical vapor deposition of Cu-based alloy coatings containing oxophilic elements such as aluminum." @default.
• W2078991087 created "2016-06-24" @default.
• W2078991087 creator A5013953415 @default.
• W2078991087 creator A5023569509 @default.
• W2078991087 creator A5047021668 @default.
• W2078991087 creator A5053407693 @default.
• W2078991087 creator A5082512064 @default.
• W2078991087 creator A5083471252 @default.
• W2078991087 creator A5090232295 @default.
• W2078991087 date "2011-01-01" @default.
• W2078991087 modified "2023-09-30" @default.
• W2078991087 title "CVD of Pure Copper Films from Amidinate Precursor" @default.
• W2078991087 cites W1968208370 @default.
• W2078991087 cites W1975695709 @default.
• W2078991087 cites W1976864888 @default.
• W2078991087 cites W1985610309 @default.
• W2078991087 cites W2005171297 @default.
• W2078991087 cites W2005585170 @default.
• W2078991087 cites W2016741395 @default.
• W2078991087 cites W2020367171 @default.
• W2078991087 cites W2025172217 @default.
• W2078991087 cites W2032011969 @default.
• W2078991087 cites W2032020793 @default.
• W2078991087 cites W2033906886 @default.
• W2078991087 cites W2036130262 @default.
• W2078991087 cites W2044474251 @default.
• W2078991087 cites W2044982819 @default.
• W2078991087 cites W2046068663 @default.
• W2078991087 cites W2046245855 @default.
• W2078991087 cites W2059596287 @default.
• W2078991087 cites W2063392340 @default.
• W2078991087 cites W2066461633 @default.
• W2078991087 cites W2071478450 @default.
• W2078991087 cites W2093632972 @default.
• W2078991087 cites W2123786762 @default.
• W2078991087 cites W2137108081 @default.
• W2078991087 cites W2140017579 @default.
• W2078991087 cites W2154254816 @default.
• W2078991087 cites W2312691834 @default.
• W2078991087 cites W2009510290 @default.
• W2078991087 doi "https://doi.org/10.1149/1.3526142" @default.
• W2078991087 hasPublicationYear "2011" @default.
• W2078991087 type Work @default.
• W2078991087 sameAs 2078991087 @default.
• W2078991087 citedByCount "30" @default.
• W2078991087 countsByYear W20789910872012 @default.
• W2078991087 countsByYear W20789910872013 @default.
• W2078991087 countsByYear W20789910872014 @default.
• W2078991087 countsByYear W20789910872015 @default.
• W2078991087 countsByYear W20789910872016 @default.
• W2078991087 countsByYear W20789910872017 @default.
• W2078991087 countsByYear W20789910872018 @default.
• W2078991087 countsByYear W20789910872019 @default.
• W2078991087 countsByYear W20789910872020 @default.
• W2078991087 countsByYear W20789910872021 @default.
• W2078991087 countsByYear W20789910872022 @default.
• W2078991087 crossrefType "journal-article" @default.
• W2078991087 hasAuthorship W2078991087A5013953415 @default.
• W2078991087 hasAuthorship W2078991087A5023569509 @default.
• W2078991087 hasAuthorship W2078991087A5047021668 @default.
• W2078991087 hasAuthorship W2078991087A5053407693 @default.
• W2078991087 hasAuthorship W2078991087A5082512064 @default.
• W2078991087 hasAuthorship W2078991087A5083471252 @default.
• W2078991087 hasAuthorship W2078991087A5090232295 @default.
• W2078991087 hasBestOaLocation W20789910872 @default.
• W2078991087 hasConcept C121332964 @default.
• W2078991087 hasConcept C124681953 @default.
• W2078991087 hasConcept C127413603 @default.
• W2078991087 hasConcept C153294291 @default.
• W2078991087 hasConcept C160434732 @default.
• W2078991087 hasConcept C171250308 @default.
• W2078991087 hasConcept C178790620 @default.
• W2078991087 hasConcept C179104552 @default.
• W2078991087 hasConcept C185592680 @default.
• W2078991087 hasConcept C191897082 @default.
• W2078991087 hasConcept C192562407 @default.
• W2078991087 hasConcept C2780026712 @default.
• W2078991087 hasConcept C32909587 @default.
• W2078991087 hasConcept C39353612 @default.
• W2078991087 hasConcept C40875361 @default.
• W2078991087 hasConcept C42360764 @default.
• W2078991087 hasConcept C512968161 @default.
• W2078991087 hasConcept C513153333 @default.
• W2078991087 hasConcept C544153396 @default.
• W2078991087 hasConcept C544778455 @default.
• W2078991087 hasConcept C544956773 @default.
• W2078991087 hasConcept C57410435 @default.
• W2078991087 hasConceptScore W2078991087C121332964 @default.
• W2078991087 hasConceptScore W2078991087C124681953 @default.
• W2078991087 hasConceptScore W2078991087C127413603 @default.
• W2078991087 hasConceptScore W2078991087C153294291 @default.
• W2078991087 hasConceptScore W2078991087C160434732 @default.
• W2078991087 hasConceptScore W2078991087C171250308 @default.
• W2078991087 hasConceptScore W2078991087C178790620 @default.
• W2078991087 hasConceptScore W2078991087C179104552 @default.
• W2078991087 hasConceptScore W2078991087C185592680 @default.
• W2078991087 hasConceptScore W2078991087C191897082 @default.
• W2078991087 hasConceptScore W2078991087C192562407 @default.

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