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- W2078996940 abstract "Abstract Diamond-like carbon film, prepared by the dual-ion beam sputtering method, was irradiated by 110 keV Fe+ ions up to a fluence of 1 × 1017 ions/cm2. The infra-red absorption spectrum, the electrical resistivity of the film, Raman spectrum, Auger electronic spectroscopy and reflection electron energy loss spectroscopy were used to characterize the film before and/or after the irradiation. It was shown that the 110 keV Fe+ ion irradiation led to the breaking of CH bonds and, consequently, the decrease of sp3 CH and sp2 CH bonds. The irradiation also led to the decrease of the bond-angle disorder and the growth in size and/or number of sp2 bond dominated crystallites in the film. More serious damage was introduced in the near surface region of the film and thus more graphite-like structure was formed in this region. Because of these structural changes, the electrical and the optical properties of the film were degraded after the irradiation. It was concluded that the irradiation effect of 110 keV Fe+ on diamond-like carbon film is nearly the same as that of 114 keV C+ and 1.5 MeV H+." @default.
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- W2078996940 date "1995-03-01" @default.
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- W2078996940 title "The property and structural changes of diamond-like carbon films after irradiation with 110 keV Fe+ ions" @default.
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- W2078996940 doi "https://doi.org/10.1016/0168-583x(94)00542-7" @default.
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