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- W2079071668 abstract "We have found that the photo-misalignment problem in patterned and bonded silicon-on-insulator (PBSOI) was closely related to the bonding process. We examined the stress effect on photo-misalignment using a vacuum bonding system. Photo-misalignment was critically dependent on the distance between bonding plates. Good alignment, which is less than 0.1 µm and has uniform direction within a wafer, could be achieved with a 1.4 mm separation width between bonding plates." @default.
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- W2079071668 date "1999-06-01" @default.
- W2079071668 modified "2023-09-26" @default.
- W2079071668 title "Improvement of Photo-Misalignment in Patterned Wafer Bonding Process for Silicon-on-Insulator Device" @default.
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- W2079071668 doi "https://doi.org/10.1143/jjap.38.3487" @default.
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