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- W2079088993 abstract "Abstract An automatic ellipsometer of picometer sensitivity has been developed for sputtering rate monitoring of extreme ultraviolet multilayer fabrication. With the automatic ellipsometer, the relative amplitude attenuation ρ were measured at every 0.2 s during fabrication of a periodic multilayer composed of a 2.9-nm Mo layer and a 4.0-nm Si layer. The recorded data plotted with calibrated thickness by X-ray diffractometry proved the picometer sensitivity needed for 0.1% reflection wavelength matching of the mirror multilayers of nanometer periods." @default.
- W2079088993 created "2016-06-24" @default.
- W2079088993 creator A5004462153 @default.
- W2079088993 creator A5018453061 @default.
- W2079088993 creator A5079163916 @default.
- W2079088993 date "2003-06-01" @default.
- W2079088993 modified "2023-09-27" @default.
- W2079088993 title "A tracking ellipsometer of picometer sensitivity enabling 0.1% sputtering-rate monitoring of EUV nanometer multilayer fabrication" @default.
- W2079088993 cites W1979702561 @default.
- W2079088993 cites W1988737263 @default.
- W2079088993 cites W1999734163 @default.
- W2079088993 cites W2021187881 @default.
- W2079088993 cites W2026099069 @default.
- W2079088993 cites W2027904145 @default.
- W2079088993 cites W2031202099 @default.
- W2079088993 cites W2033818506 @default.
- W2079088993 cites W2039598316 @default.
- W2079088993 cites W2061392860 @default.
- W2079088993 cites W2075365289 @default.
- W2079088993 cites W2075428078 @default.
- W2079088993 cites W2140766788 @default.
- W2079088993 cites W2159132727 @default.
- W2079088993 cites W2159999425 @default.
- W2079088993 cites W2170575768 @default.
- W2079088993 cites W2313249084 @default.
- W2079088993 cites W1990207942 @default.
- W2079088993 doi "https://doi.org/10.1016/s0040-6090(03)00287-6" @default.
- W2079088993 hasPublicationYear "2003" @default.
- W2079088993 type Work @default.
- W2079088993 sameAs 2079088993 @default.
- W2079088993 citedByCount "8" @default.
- W2079088993 countsByYear W20790889932018 @default.
- W2079088993 crossrefType "journal-article" @default.
- W2079088993 hasAuthorship W2079088993A5004462153 @default.
- W2079088993 hasAuthorship W2079088993A5018453061 @default.
- W2079088993 hasAuthorship W2079088993A5079163916 @default.
- W2079088993 hasConcept C120665830 @default.
- W2079088993 hasConcept C121332964 @default.
- W2079088993 hasConcept C136525101 @default.
- W2079088993 hasConcept C142724271 @default.
- W2079088993 hasConcept C146024833 @default.
- W2079088993 hasConcept C162996421 @default.
- W2079088993 hasConcept C171250308 @default.
- W2079088993 hasConcept C18293161 @default.
- W2079088993 hasConcept C19067145 @default.
- W2079088993 hasConcept C192562407 @default.
- W2079088993 hasConcept C204787440 @default.
- W2079088993 hasConcept C22423302 @default.
- W2079088993 hasConcept C49040817 @default.
- W2079088993 hasConcept C520434653 @default.
- W2079088993 hasConcept C61427134 @default.
- W2079088993 hasConcept C6260449 @default.
- W2079088993 hasConcept C71924100 @default.
- W2079088993 hasConcept C77066764 @default.
- W2079088993 hasConceptScore W2079088993C120665830 @default.
- W2079088993 hasConceptScore W2079088993C121332964 @default.
- W2079088993 hasConceptScore W2079088993C136525101 @default.
- W2079088993 hasConceptScore W2079088993C142724271 @default.
- W2079088993 hasConceptScore W2079088993C146024833 @default.
- W2079088993 hasConceptScore W2079088993C162996421 @default.
- W2079088993 hasConceptScore W2079088993C171250308 @default.
- W2079088993 hasConceptScore W2079088993C18293161 @default.
- W2079088993 hasConceptScore W2079088993C19067145 @default.
- W2079088993 hasConceptScore W2079088993C192562407 @default.
- W2079088993 hasConceptScore W2079088993C204787440 @default.
- W2079088993 hasConceptScore W2079088993C22423302 @default.
- W2079088993 hasConceptScore W2079088993C49040817 @default.
- W2079088993 hasConceptScore W2079088993C520434653 @default.
- W2079088993 hasConceptScore W2079088993C61427134 @default.
- W2079088993 hasConceptScore W2079088993C6260449 @default.
- W2079088993 hasConceptScore W2079088993C71924100 @default.
- W2079088993 hasConceptScore W2079088993C77066764 @default.
- W2079088993 hasLocation W20790889931 @default.
- W2079088993 hasOpenAccess W2079088993 @default.
- W2079088993 hasPrimaryLocation W20790889931 @default.
- W2079088993 hasRelatedWork W1561906948 @default.
- W2079088993 hasRelatedWork W1964440124 @default.
- W2079088993 hasRelatedWork W1978661155 @default.
- W2079088993 hasRelatedWork W1992563783 @default.
- W2079088993 hasRelatedWork W2026022625 @default.
- W2079088993 hasRelatedWork W2132949922 @default.
- W2079088993 hasRelatedWork W2185137133 @default.
- W2079088993 hasRelatedWork W2377869377 @default.
- W2079088993 hasRelatedWork W2805821601 @default.
- W2079088993 hasRelatedWork W4211174049 @default.
- W2079088993 isParatext "false" @default.
- W2079088993 isRetracted "false" @default.
- W2079088993 magId "2079088993" @default.
- W2079088993 workType "article" @default.