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- W2079128224 abstract "To maintain high transmittance for long time use in the ArF and F<sub>2</sub> lithography exposure tools is highly requested, which is strongly dependent on the transmittance of the optical coatings. The following experimental fact was reported in the F<sub>2</sub> laser durability testing; the transmittance degradation of the optical coatings did not occur under low power laser irradiation of less than 5 mJ/cm<sup>2</sup>, but a catastrophic degradation of transmittance did under high power laser irradiation over 15 mJ/cm<sup>2</sup>. We have set a program to investigate the causes of the laser-induced degradation of the optical coatings. Consequently, we have found a relationship between the contaminations of the irradiation atmosphere and the transmittance degradation through various experimental conditions and analyses such as SIMS and GCMS. Finally, we have succeeded in remarkably improving the durability of the antireflection coating (ARC) by optimizing the atmospheric conditions." @default.
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- W2079128224 date "2005-05-12" @default.
- W2079128224 modified "2023-10-18" @default.
- W2079128224 title "Improvement of the lifetime of the optical coatings under high power laser irradiations" @default.
- W2079128224 doi "https://doi.org/10.1117/12.597156" @default.
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