Matches in SemOpenAlex for { <https://semopenalex.org/work/W2079148875> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2079148875 endingPage "287" @default.
- W2079148875 startingPage "280" @default.
- W2079148875 abstract "Abstract The nanostructural evolution during heat treatments of DC magnetron-sputtered Cu films deposited at different substrate bias voltages was experimentally studied. A growth chamber equipped with two magnetrons and Kapton windows for in-situ X-ray diffraction was mounted on a six-circle goniometer at a synchrotron beam line. Using Bragg–Brentano X-ray diffraction, the grain size, the texture, and the lattice constant were monitored during thermal annealing. Increasing the substrate bias voltage, the grain growth rate lowered, and the change in texture with time became smaller due to a decrease in the defect concentration. Furthermore, the grain size in the as-deposited films decreased with increasing bias voltage. The activation energy for grain growth was, within experimental errors, the same in all the films." @default.
- W2079148875 created "2016-06-24" @default.
- W2079148875 creator A5026699674 @default.
- W2079148875 creator A5035120506 @default.
- W2079148875 creator A5081590542 @default.
- W2079148875 creator A5088053063 @default.
- W2079148875 date "2005-04-01" @default.
- W2079148875 modified "2023-10-05" @default.
- W2079148875 title "On the dependence on bias voltage of the structural evolution of magnetron- sputtered nanocrystalline Cu films during thermal annealing" @default.
- W2079148875 cites W1585533436 @default.
- W2079148875 cites W1963923594 @default.
- W2079148875 cites W1976068479 @default.
- W2079148875 cites W1990775218 @default.
- W2079148875 cites W1992320824 @default.
- W2079148875 cites W1992645603 @default.
- W2079148875 cites W2008588948 @default.
- W2079148875 cites W2033722811 @default.
- W2079148875 cites W2057422008 @default.
- W2079148875 cites W2064137657 @default.
- W2079148875 cites W2065028460 @default.
- W2079148875 cites W2094069868 @default.
- W2079148875 cites W2137291112 @default.
- W2079148875 cites W4211156307 @default.
- W2079148875 doi "https://doi.org/10.1016/j.tsf.2004.09.033" @default.
- W2079148875 hasPublicationYear "2005" @default.
- W2079148875 type Work @default.
- W2079148875 sameAs 2079148875 @default.
- W2079148875 citedByCount "6" @default.
- W2079148875 countsByYear W20791488752014 @default.
- W2079148875 countsByYear W20791488752015 @default.
- W2079148875 countsByYear W20791488752019 @default.
- W2079148875 countsByYear W20791488752021 @default.
- W2079148875 crossrefType "journal-article" @default.
- W2079148875 hasAuthorship W2079148875A5026699674 @default.
- W2079148875 hasAuthorship W2079148875A5035120506 @default.
- W2079148875 hasAuthorship W2079148875A5081590542 @default.
- W2079148875 hasAuthorship W2079148875A5088053063 @default.
- W2079148875 hasConcept C119599485 @default.
- W2079148875 hasConcept C123408415 @default.
- W2079148875 hasConcept C127413603 @default.
- W2079148875 hasConcept C140676511 @default.
- W2079148875 hasConcept C165801399 @default.
- W2079148875 hasConcept C171250308 @default.
- W2079148875 hasConcept C175854130 @default.
- W2079148875 hasConcept C19067145 @default.
- W2079148875 hasConcept C191897082 @default.
- W2079148875 hasConcept C192562407 @default.
- W2079148875 hasConcept C20254490 @default.
- W2079148875 hasConcept C22423302 @default.
- W2079148875 hasConcept C2777855556 @default.
- W2079148875 hasConcept C61427134 @default.
- W2079148875 hasConceptScore W2079148875C119599485 @default.
- W2079148875 hasConceptScore W2079148875C123408415 @default.
- W2079148875 hasConceptScore W2079148875C127413603 @default.
- W2079148875 hasConceptScore W2079148875C140676511 @default.
- W2079148875 hasConceptScore W2079148875C165801399 @default.
- W2079148875 hasConceptScore W2079148875C171250308 @default.
- W2079148875 hasConceptScore W2079148875C175854130 @default.
- W2079148875 hasConceptScore W2079148875C19067145 @default.
- W2079148875 hasConceptScore W2079148875C191897082 @default.
- W2079148875 hasConceptScore W2079148875C192562407 @default.
- W2079148875 hasConceptScore W2079148875C20254490 @default.
- W2079148875 hasConceptScore W2079148875C22423302 @default.
- W2079148875 hasConceptScore W2079148875C2777855556 @default.
- W2079148875 hasConceptScore W2079148875C61427134 @default.
- W2079148875 hasIssue "2" @default.
- W2079148875 hasLocation W20791488751 @default.
- W2079148875 hasOpenAccess W2079148875 @default.
- W2079148875 hasPrimaryLocation W20791488751 @default.
- W2079148875 hasRelatedWork W1969786090 @default.
- W2079148875 hasRelatedWork W2009023799 @default.
- W2079148875 hasRelatedWork W2029460333 @default.
- W2079148875 hasRelatedWork W2039666929 @default.
- W2079148875 hasRelatedWork W2088091229 @default.
- W2079148875 hasRelatedWork W2092364266 @default.
- W2079148875 hasRelatedWork W2944705329 @default.
- W2079148875 hasRelatedWork W3116458923 @default.
- W2079148875 hasRelatedWork W3193980021 @default.
- W2079148875 hasRelatedWork W4254148944 @default.
- W2079148875 hasVolume "476" @default.
- W2079148875 isParatext "false" @default.
- W2079148875 isRetracted "false" @default.
- W2079148875 magId "2079148875" @default.
- W2079148875 workType "article" @default.