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- W2079156385 abstract "Optical profiling instruments utilizing phase-shifting interferometry offer one the opportunity to obtain a large amount of surface texture data quickly without damaging the measured surface. Unfortunately, the presence of dissimilar surface materials or even spatial variations in the subsurface morphology can result in spurious optical measurements. This paper presents equations that can be used to calculate the reflection of electromagnetic radiation from thin film structures. These equations are utilized to determine what minimum metal overcoat thickness will ensure accurate optical step height measurements. Interferometric and stylus- based measurements of three thin film steps are presented and discussed. An opaque metal overcoat is found to be essential to the accurate optical measurement of step heights." @default.
- W2079156385 created "2016-06-24" @default.
- W2079156385 creator A5007687992 @default.
- W2079156385 creator A5008019947 @default.
- W2079156385 creator A5024284183 @default.
- W2079156385 creator A5026289749 @default.
- W2079156385 date "1992-12-15" @default.
- W2079156385 modified "2023-09-23" @default.
- W2079156385 title "<title>Effects of thin films on interferometric step height measurements</title>" @default.
- W2079156385 doi "https://doi.org/10.1117/12.139238" @default.
- W2079156385 hasPublicationYear "1992" @default.
- W2079156385 type Work @default.
- W2079156385 sameAs 2079156385 @default.
- W2079156385 citedByCount "2" @default.
- W2079156385 crossrefType "proceedings-article" @default.
- W2079156385 hasAuthorship W2079156385A5007687992 @default.
- W2079156385 hasAuthorship W2079156385A5008019947 @default.
- W2079156385 hasAuthorship W2079156385A5024284183 @default.
- W2079156385 hasAuthorship W2079156385A5026289749 @default.
- W2079156385 hasConcept C119857082 @default.
- W2079156385 hasConcept C120665830 @default.
- W2079156385 hasConcept C121332964 @default.
- W2079156385 hasConcept C159985019 @default.
- W2079156385 hasConcept C164086593 @default.
- W2079156385 hasConcept C166689943 @default.
- W2079156385 hasConcept C171250308 @default.
- W2079156385 hasConcept C19067145 @default.
- W2079156385 hasConcept C192562407 @default.
- W2079156385 hasConcept C199360897 @default.
- W2079156385 hasConcept C24890656 @default.
- W2079156385 hasConcept C41008148 @default.
- W2079156385 hasConcept C60056205 @default.
- W2079156385 hasConcept C65682993 @default.
- W2079156385 hasConcept C71039073 @default.
- W2079156385 hasConcept C97256817 @default.
- W2079156385 hasConceptScore W2079156385C119857082 @default.
- W2079156385 hasConceptScore W2079156385C120665830 @default.
- W2079156385 hasConceptScore W2079156385C121332964 @default.
- W2079156385 hasConceptScore W2079156385C159985019 @default.
- W2079156385 hasConceptScore W2079156385C164086593 @default.
- W2079156385 hasConceptScore W2079156385C166689943 @default.
- W2079156385 hasConceptScore W2079156385C171250308 @default.
- W2079156385 hasConceptScore W2079156385C19067145 @default.
- W2079156385 hasConceptScore W2079156385C192562407 @default.
- W2079156385 hasConceptScore W2079156385C199360897 @default.
- W2079156385 hasConceptScore W2079156385C24890656 @default.
- W2079156385 hasConceptScore W2079156385C41008148 @default.
- W2079156385 hasConceptScore W2079156385C60056205 @default.
- W2079156385 hasConceptScore W2079156385C65682993 @default.
- W2079156385 hasConceptScore W2079156385C71039073 @default.
- W2079156385 hasConceptScore W2079156385C97256817 @default.
- W2079156385 hasLocation W20791563851 @default.
- W2079156385 hasOpenAccess W2079156385 @default.
- W2079156385 hasPrimaryLocation W20791563851 @default.
- W2079156385 hasRelatedWork W1978544559 @default.
- W2079156385 hasRelatedWork W1982674708 @default.
- W2079156385 hasRelatedWork W1993433469 @default.
- W2079156385 hasRelatedWork W2000682777 @default.
- W2079156385 hasRelatedWork W2025223676 @default.
- W2079156385 hasRelatedWork W2041238377 @default.
- W2079156385 hasRelatedWork W2048577835 @default.
- W2079156385 hasRelatedWork W2065294548 @default.
- W2079156385 hasRelatedWork W2089051935 @default.
- W2079156385 hasRelatedWork W2127647066 @default.
- W2079156385 isParatext "false" @default.
- W2079156385 isRetracted "false" @default.
- W2079156385 magId "2079156385" @default.
- W2079156385 workType "article" @default.