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- W2079189719 abstract "In the paper we report some work on the programming of phase shift mask (PSM) simulation software, some important parameters are analyzed, in the meantime, we set up the mathematical models for studying rounding characteristics of imaging of the bar patterns under the project lithography system with incoherent, partial coherent, coherent illumination, and theoretical results compared to the experimental results.© (1994) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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- W2079189719 date "1994-05-17" @default.
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- W2079189719 title "<title>Programming of phase-shift mask simulation software and some important aspects</title>" @default.
- W2079189719 doi "https://doi.org/10.1117/12.175445" @default.
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