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- W2079311947 abstract "Scaling in material properties is of great importance in microsystems and microelectronics where the device dimensions continuously shrink. Recently, compression tests of micron-sized pillars produced using a focused-ion beam (FIB) have become standard in the investigation of scaling effects. The influence of the fabrication process on the mechanical properties of the samples has, however, not been conclusively resolved. In this study, 130 silver pillars were fabricated using a novel embossing technique that does not pose the issues associated with FIB milling, i.e. surface amorphization and gallium contamination. Displacement-controlled compression tests on pillars with diameters of 130–3000 nm reveal for submicrometer samples an inverse proportionality of flow strength to diameter, which is associated with a wide strength distribution and a deformation taking place in large discrete strain bursts. The largest pillars show instead near bulk-like behavior. Unlike studies on other fcc materials, mechanical..." @default.
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- W2079311947 date "2009-04-01" @default.
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- W2079311947 title "Deformation behavior of silver submicrometer-pillars prepared by nanoimprinting" @default.
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- W2079311947 doi "https://doi.org/10.1080/14786430902791748" @default.
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