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• W2079332541 abstract "Abstract The effect of low kinetic energy (0.5 2 keV. A detailed analysis of the Si 2p and Si KLL spectral shapes reveal that new Si+ and, to a lesser extend, Si4+ species are formed in detriment of the initial Si3+ and Si+ species present in the original SiO1.3 sample. Bombardment with Ar+ ions of lower kinetic energy (Ek" @default.
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• W2079332541 date "2002-04-01" @default.
• W2079332541 modified "2023-10-18" @default.
• W2079332541 title "Ion beam effects in SiOx (x<2) subjected to low energy Ar+, He+ and N2+ bombardment" @default.
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• W2079332541 doi "https://doi.org/10.1016/s0168-583x(01)01153-3" @default.
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