FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2079336027> ?p ?o ?g. }

• W2079336027 endingPage "905" @default.
• W2079336027 startingPage "899" @default.
• W2079336027 abstract "We have examined boron penetration from heavily boron-doped p+-polycrystalline-Si gate into the gate dielectric/Si-sidewall interface and into bulk Si of U-shaped trench metal-oxide-Si capacitor. We have found that the inclusion of a thin nitride layer atop the thermal gate oxide inhibits boron penetration from the boron-doped p+-polycrystalline-Si gate into the dielectric/Si-sidewall interface and into bulk Si. The incorporation of the nitride layer on top of the thermal oxide to produce a two-layer gate dielectric, however, is observed to result in a significantly weaker dielectric, which breaks down at relatively low electric fields. This is the first time that degradation in breakdown qualities of thermal oxides in the presence of nitride layers is reported. Interface state bands are observed by deep level transient spectroscopy. These bands cover most of the Si bandgap and are of comparable concentrations in capacitors with different gate dielectric compositions (e.g., bare oxide, nitride-on-oxide or oxynitride) irrespective of the polycrystalline-Si gate doping (e.g., boron-doped p+ or phosphorus-doped n+). These energy bands are argued to be independent of gate dopant atoms as well as independent of nitrogen atoms coming from the oxynitride in the gate dielectric." @default.
• W2079336027 created "2016-06-24" @default.
• W2079336027 creator A5020460405 @default.
• W2079336027 creator A5021507782 @default.
• W2079336027 creator A5022157881 @default.
• W2079336027 creator A5032175829 @default.
• W2079336027 creator A5046689415 @default.
• W2079336027 creator A5048627460 @default.
• W2079336027 creator A5053626346 @default.
• W2079336027 creator A5056606945 @default.
• W2079336027 date "2003-05-01" @default.
• W2079336027 modified "2023-10-01" @default.
• W2079336027 title "Electrical properties of the gate oxide and its interface with Si in U-shaped trench MOS capacitors: The impact of polycrystalline Si doping and oxide composition" @default.
• W2079336027 cites W1983840242 @default.
• W2079336027 cites W1990947694 @default.
• W2079336027 cites W1992306551 @default.
• W2079336027 cites W2025030624 @default.
• W2079336027 cites W2028576602 @default.
• W2079336027 cites W2037671463 @default.
• W2079336027 cites W2057812904 @default.
• W2079336027 cites W2070329160 @default.
• W2079336027 cites W2078789051 @default.
• W2079336027 cites W2088910837 @default.
• W2079336027 cites W2095790875 @default.
• W2079336027 cites W2101316447 @default.
• W2079336027 cites W2104049166 @default.
• W2079336027 doi "https://doi.org/10.1016/s0038-1101(02)00442-2" @default.
• W2079336027 hasPublicationYear "2003" @default.
• W2079336027 type Work @default.
• W2079336027 sameAs 2079336027 @default.
• W2079336027 citedByCount "3" @default.
• W2079336027 countsByYear W20793360272013 @default.
• W2079336027 countsByYear W20793360272020 @default.
• W2079336027 countsByYear W20793360272022 @default.
• W2079336027 crossrefType "journal-article" @default.
• W2079336027 hasAuthorship W2079336027A5020460405 @default.
• W2079336027 hasAuthorship W2079336027A5021507782 @default.
• W2079336027 hasAuthorship W2079336027A5022157881 @default.
• W2079336027 hasAuthorship W2079336027A5032175829 @default.
• W2079336027 hasAuthorship W2079336027A5046689415 @default.
• W2079336027 hasAuthorship W2079336027A5048627460 @default.
• W2079336027 hasAuthorship W2079336027A5053626346 @default.
• W2079336027 hasAuthorship W2079336027A5056606945 @default.
• W2079336027 hasConcept C119599485 @default.
• W2079336027 hasConcept C127413603 @default.
• W2079336027 hasConcept C133386390 @default.
• W2079336027 hasConcept C152909973 @default.
• W2079336027 hasConcept C165801399 @default.
• W2079336027 hasConcept C166972891 @default.
• W2079336027 hasConcept C171250308 @default.
• W2079336027 hasConcept C172385210 @default.
• W2079336027 hasConcept C191897082 @default.
• W2079336027 hasConcept C192562407 @default.
• W2079336027 hasConcept C194760766 @default.
• W2079336027 hasConcept C2361726 @default.
• W2079336027 hasConcept C2779227376 @default.
• W2079336027 hasConcept C2779851234 @default.
• W2079336027 hasConcept C2780243435 @default.
• W2079336027 hasConcept C49040817 @default.
• W2079336027 hasConcept C52192207 @default.
• W2079336027 hasConcept C52780932 @default.
• W2079336027 hasConcept C57863236 @default.
• W2079336027 hasConceptScore W2079336027C119599485 @default.
• W2079336027 hasConceptScore W2079336027C127413603 @default.
• W2079336027 hasConceptScore W2079336027C133386390 @default.
• W2079336027 hasConceptScore W2079336027C152909973 @default.
• W2079336027 hasConceptScore W2079336027C165801399 @default.
• W2079336027 hasConceptScore W2079336027C166972891 @default.
• W2079336027 hasConceptScore W2079336027C171250308 @default.
• W2079336027 hasConceptScore W2079336027C172385210 @default.
• W2079336027 hasConceptScore W2079336027C191897082 @default.
• W2079336027 hasConceptScore W2079336027C192562407 @default.
• W2079336027 hasConceptScore W2079336027C194760766 @default.
• W2079336027 hasConceptScore W2079336027C2361726 @default.
• W2079336027 hasConceptScore W2079336027C2779227376 @default.
• W2079336027 hasConceptScore W2079336027C2779851234 @default.
• W2079336027 hasConceptScore W2079336027C2780243435 @default.
• W2079336027 hasConceptScore W2079336027C49040817 @default.
• W2079336027 hasConceptScore W2079336027C52192207 @default.
• W2079336027 hasConceptScore W2079336027C52780932 @default.
• W2079336027 hasConceptScore W2079336027C57863236 @default.
• W2079336027 hasIssue "5" @default.
• W2079336027 hasLocation W20793360271 @default.
• W2079336027 hasOpenAccess W2079336027 @default.
• W2079336027 hasPrimaryLocation W20793360271 @default.
• W2079336027 hasRelatedWork W1560462767 @default.
• W2079336027 hasRelatedWork W1954343641 @default.
• W2079336027 hasRelatedWork W1964443114 @default.
• W2079336027 hasRelatedWork W1974152047 @default.
• W2079336027 hasRelatedWork W1985621513 @default.
• W2079336027 hasRelatedWork W2003743443 @default.
• W2079336027 hasRelatedWork W2114842981 @default.
• W2079336027 hasRelatedWork W2146295688 @default.
• W2079336027 hasRelatedWork W2160937327 @default.
• W2079336027 hasRelatedWork W3209083003 @default.
• W2079336027 hasVolume "47" @default.
• W2079336027 isParatext "false" @default.
• W2079336027 isRetracted "false" @default.

• next