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• W2079345035 startingPage "2403" @default.
• W2079345035 abstract "Interdigitated carbon micro-electrode arrays for micro-capacitors are fabricated through the carbon microelectromechanical systems (C-MEMS) technique which is based on the carbonization of patterned photoresist. To improve the capacitive behavior, electrochemical activation is performed on carbon micro-electrode arrays. Cyclic voltammetry (CV) and galvanostatic charge–discharge results demonstrate that the electrochemical activation effectively increases the capacitance of the micro-electrode arrays by three orders of magnitude. Although the charge–discharge experiments show the non-ideal behavior of micro-capacitors, the specific geometric capacitance reaches as high as 75 mF cm−2 at a scan rate of 5 mV s−1 after electrochemical activation for 30 min. The capacitance loss is less than 13% after 1000 CV cycles. These results indicate that electrochemically activated C-MEMS micro-electrode arrays are promising candidates for on-chip electrochemical micro-capacitor application." @default.
• W2079345035 created "2016-06-24" @default.
• W2079345035 creator A5017541508 @default.
• W2079345035 creator A5050169034 @default.
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• W2079345035 date "2011-02-01" @default.
• W2079345035 modified "2023-10-15" @default.
• W2079345035 title "Electrochemically activated carbon micro-electrode arrays for electrochemical micro-capacitors" @default.
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• W2079345035 doi "https://doi.org/10.1016/j.jpowsour.2010.09.050" @default.
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