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- W2079354039 endingPage "4062" @default.
- W2079354039 startingPage "4055" @default.
- W2079354039 abstract "Tantalum films have been deposited on biased glass and ceramic substrates by dc sputtering in an oxygen-argon mixture The resistivity of the films was approximately 800 μΩ cm when the substrate bias was zero, but decreased when either positive or negative potential was applied to the substrate. Resistivities of approximately 200 μΩ cm were obtained by applying +100 and −100 V, and resistivities as low as 50 μΩ cm were obtained at a substrate bias of −200 V. The oxygen content of the films, measured by an anodization technique, was approximately 35 at.% on unbiased substrates but decreased with substrate bias. While films deposited at −100 V bias contained approximately 10 at.% oxygen, only half of this amount was present in those deposited at +100 V. The reduction in oxygen content, and thus in resistivity, can be explained by a combination of two effects. For positive and low negative bias, increased gettering due to enhanced sputtering rate is most important, but for higher negative bias, removal of oxygen by argon-ion sputtering is also important." @default.
- W2079354039 created "2016-06-24" @default.
- W2079354039 creator A5016188405 @default.
- W2079354039 creator A5090661566 @default.
- W2079354039 date "1971-09-01" @default.
- W2079354039 modified "2023-10-16" @default.
- W2079354039 title "Effect of Substrate Bias on Tantalum Films Sputtered in an Oxygen‐Argon Mixture" @default.
- W2079354039 cites W1966151398 @default.
- W2079354039 cites W1968428741 @default.
- W2079354039 cites W1977774972 @default.
- W2079354039 cites W1983088006 @default.
- W2079354039 cites W2000616555 @default.
- W2079354039 cites W2013302159 @default.
- W2079354039 cites W2018749552 @default.
- W2079354039 cites W2027555663 @default.
- W2079354039 cites W2036908036 @default.
- W2079354039 cites W2039895238 @default.
- W2079354039 cites W2072867625 @default.
- W2079354039 cites W2140899601 @default.
- W2079354039 cites W2155727422 @default.
- W2079354039 cites W4230053467 @default.
- W2079354039 doi "https://doi.org/10.1063/1.1659724" @default.
- W2079354039 hasPublicationYear "1971" @default.
- W2079354039 type Work @default.
- W2079354039 sameAs 2079354039 @default.
- W2079354039 citedByCount "22" @default.
- W2079354039 countsByYear W20793540392012 @default.
- W2079354039 crossrefType "journal-article" @default.
- W2079354039 hasAuthorship W2079354039A5016188405 @default.
- W2079354039 hasAuthorship W2079354039A5090661566 @default.
- W2079354039 hasConcept C111368507 @default.
- W2079354039 hasConcept C113196181 @default.
- W2079354039 hasConcept C119599485 @default.
- W2079354039 hasConcept C127313418 @default.
- W2079354039 hasConcept C127413603 @default.
- W2079354039 hasConcept C171250308 @default.
- W2079354039 hasConcept C178790620 @default.
- W2079354039 hasConcept C185592680 @default.
- W2079354039 hasConcept C19067145 @default.
- W2079354039 hasConcept C191897082 @default.
- W2079354039 hasConcept C192562407 @default.
- W2079354039 hasConcept C22423302 @default.
- W2079354039 hasConcept C2777289219 @default.
- W2079354039 hasConcept C43617362 @default.
- W2079354039 hasConcept C514619126 @default.
- W2079354039 hasConcept C540031477 @default.
- W2079354039 hasConcept C547737533 @default.
- W2079354039 hasConcept C61427134 @default.
- W2079354039 hasConcept C69990965 @default.
- W2079354039 hasConcept C89169090 @default.
- W2079354039 hasConceptScore W2079354039C111368507 @default.
- W2079354039 hasConceptScore W2079354039C113196181 @default.
- W2079354039 hasConceptScore W2079354039C119599485 @default.
- W2079354039 hasConceptScore W2079354039C127313418 @default.
- W2079354039 hasConceptScore W2079354039C127413603 @default.
- W2079354039 hasConceptScore W2079354039C171250308 @default.
- W2079354039 hasConceptScore W2079354039C178790620 @default.
- W2079354039 hasConceptScore W2079354039C185592680 @default.
- W2079354039 hasConceptScore W2079354039C19067145 @default.
- W2079354039 hasConceptScore W2079354039C191897082 @default.
- W2079354039 hasConceptScore W2079354039C192562407 @default.
- W2079354039 hasConceptScore W2079354039C22423302 @default.
- W2079354039 hasConceptScore W2079354039C2777289219 @default.
- W2079354039 hasConceptScore W2079354039C43617362 @default.
- W2079354039 hasConceptScore W2079354039C514619126 @default.
- W2079354039 hasConceptScore W2079354039C540031477 @default.
- W2079354039 hasConceptScore W2079354039C547737533 @default.
- W2079354039 hasConceptScore W2079354039C61427134 @default.
- W2079354039 hasConceptScore W2079354039C69990965 @default.
- W2079354039 hasConceptScore W2079354039C89169090 @default.
- W2079354039 hasIssue "10" @default.
- W2079354039 hasLocation W20793540391 @default.
- W2079354039 hasOpenAccess W2079354039 @default.
- W2079354039 hasPrimaryLocation W20793540391 @default.
- W2079354039 hasRelatedWork W2004468477 @default.
- W2079354039 hasRelatedWork W2062079274 @default.
- W2079354039 hasRelatedWork W2076986783 @default.
- W2079354039 hasRelatedWork W2079462963 @default.
- W2079354039 hasRelatedWork W2085953416 @default.
- W2079354039 hasRelatedWork W2086744665 @default.
- W2079354039 hasRelatedWork W2373012329 @default.
- W2079354039 hasRelatedWork W2389286191 @default.
- W2079354039 hasRelatedWork W2526521535 @default.
- W2079354039 hasRelatedWork W301690088 @default.
- W2079354039 hasVolume "42" @default.
- W2079354039 isParatext "false" @default.
- W2079354039 isRetracted "false" @default.
- W2079354039 magId "2079354039" @default.
- W2079354039 workType "article" @default.