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• W2079355132 abstract "As device dimensions and wire dimensions are reduced, it is desirable to increase the electromigration lifetime of Cu. A simple method to improve the electromigration lifetime is to dope the Cu with impurities, such as Al, Ag, Ti, or Mn, using an alloy seed layer. During subsequent anneals, the impurities segregate at grain boundaries and interfaces, including the critical interface between the Cu and the capping layer. The presence of the impurities at the interfaces reduces Cu diffusion, resulting in an enhancement of electromigration lifetimes of up to 10x. The main challenge with the use of alloy seed layers is the increase in resistivity caused by doping. With alloy seed layers, there is always a trade-off between increased reliability and increased resistivity." @default.
• W2079355132 created "2016-06-24" @default.
• W2079355132 creator A5084004412 @default.
• W2079355132 date "2010-07-01" @default.
• W2079355132 modified "2023-09-27" @default.
• W2079355132 title "Improved reliability of copper interconnects using alloying" @default.
• W2079355132 cites W1969963310 @default.
• W2079355132 cites W2025092262 @default.
• W2079355132 cites W2029287584 @default.
• W2079355132 cites W2031179025 @default.
• W2079355132 cites W2034201802 @default.
• W2079355132 cites W2046384069 @default.
• W2079355132 cites W2050692632 @default.
• W2079355132 cites W2061408966 @default.
• W2079355132 cites W2062485772 @default.
• W2079355132 cites W2066649429 @default.
• W2079355132 cites W2067528876 @default.
• W2079355132 cites W2069471268 @default.
• W2079355132 cites W2071234237 @default.
• W2079355132 cites W2071374323 @default.
• W2079355132 cites W2073018186 @default.
• W2079355132 cites W2087849199 @default.
• W2079355132 cites W2094046092 @default.
• W2079355132 cites W2126712109 @default.
• W2079355132 cites W2129336955 @default.
• W2079355132 cites W2142139935 @default.
• W2079355132 cites W2145411134 @default.
• W2079355132 cites W2154600784 @default.
• W2079355132 cites W2161145773 @default.
• W2079355132 cites W2164220709 @default.
• W2079355132 cites W2323720503 @default.
• W2079355132 cites W4240298154 @default.
• W2079355132 doi "https://doi.org/10.1109/ipfa.2010.5532242" @default.
• W2079355132 hasPublicationYear "2010" @default.
• W2079355132 type Work @default.
• W2079355132 sameAs 2079355132 @default.
• W2079355132 citedByCount "10" @default.
• W2079355132 countsByYear W20793551322013 @default.
• W2079355132 countsByYear W20793551322014 @default.
• W2079355132 countsByYear W20793551322015 @default.
• W2079355132 countsByYear W20793551322017 @default.
• W2079355132 countsByYear W20793551322019 @default.
• W2079355132 countsByYear W20793551322023 @default.
• W2079355132 crossrefType "proceedings-article" @default.
• W2079355132 hasAuthorship W2079355132A5084004412 @default.
• W2079355132 hasConcept C116372231 @default.
• W2079355132 hasConcept C119599485 @default.
• W2079355132 hasConcept C121332964 @default.
• W2079355132 hasConcept C127413603 @default.
• W2079355132 hasConcept C138055206 @default.
• W2079355132 hasConcept C159985019 @default.
• W2079355132 hasConcept C163258240 @default.
• W2079355132 hasConcept C178790620 @default.
• W2079355132 hasConcept C185592680 @default.
• W2079355132 hasConcept C191897082 @default.
• W2079355132 hasConcept C192562407 @default.
• W2079355132 hasConcept C2779227376 @default.
• W2079355132 hasConcept C2780026712 @default.
• W2079355132 hasConcept C43214815 @default.
• W2079355132 hasConcept C47908070 @default.
• W2079355132 hasConcept C49040817 @default.
• W2079355132 hasConcept C544778455 @default.
• W2079355132 hasConcept C57863236 @default.
• W2079355132 hasConcept C69357855 @default.
• W2079355132 hasConcept C69990965 @default.
• W2079355132 hasConcept C71987851 @default.
• W2079355132 hasConcept C87976508 @default.
• W2079355132 hasConcept C97355855 @default.
• W2079355132 hasConceptScore W2079355132C116372231 @default.
• W2079355132 hasConceptScore W2079355132C119599485 @default.
• W2079355132 hasConceptScore W2079355132C121332964 @default.
• W2079355132 hasConceptScore W2079355132C127413603 @default.
• W2079355132 hasConceptScore W2079355132C138055206 @default.
• W2079355132 hasConceptScore W2079355132C159985019 @default.
• W2079355132 hasConceptScore W2079355132C163258240 @default.
• W2079355132 hasConceptScore W2079355132C178790620 @default.
• W2079355132 hasConceptScore W2079355132C185592680 @default.
• W2079355132 hasConceptScore W2079355132C191897082 @default.
• W2079355132 hasConceptScore W2079355132C192562407 @default.
• W2079355132 hasConceptScore W2079355132C2779227376 @default.
• W2079355132 hasConceptScore W2079355132C2780026712 @default.
• W2079355132 hasConceptScore W2079355132C43214815 @default.
• W2079355132 hasConceptScore W2079355132C47908070 @default.
• W2079355132 hasConceptScore W2079355132C49040817 @default.
• W2079355132 hasConceptScore W2079355132C544778455 @default.
• W2079355132 hasConceptScore W2079355132C57863236 @default.
• W2079355132 hasConceptScore W2079355132C69357855 @default.
• W2079355132 hasConceptScore W2079355132C69990965 @default.
• W2079355132 hasConceptScore W2079355132C71987851 @default.
• W2079355132 hasConceptScore W2079355132C87976508 @default.
• W2079355132 hasConceptScore W2079355132C97355855 @default.
• W2079355132 hasLocation W20793551321 @default.
• W2079355132 hasOpenAccess W2079355132 @default.
• W2079355132 hasPrimaryLocation W20793551321 @default.
• W2079355132 hasRelatedWork W1846200327 @default.
• W2079355132 hasRelatedWork W1964311075 @default.
• W2079355132 hasRelatedWork W1972820050 @default.
• W2079355132 hasRelatedWork W1976036431 @default.
• W2079355132 hasRelatedWork W2012458971 @default.
• W2079355132 hasRelatedWork W2036219447 @default.

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