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- W2079357499 abstract "Synchrotron white beam with a wavefront limited by a 5 µm slit was used for obtaining the Bragg-case section patterns in silicon substrates and epitaxial layers. The section images contained various interference fringes, such as the Uragami fringes and fringes caused by crystal curvature. The system of fringes connected with individual defects was also observed. The experimental images were compared with simulated theoretical images obtained by numerical integration of the Takagi-Taupin equations. A reasonably good correspondence was obtained for dislocations inclined to the surface and misfit dislocations. The elements of the image were analysed using the visualization of | D h | 2 and | D o | 2 intensities in the plane of diffraction, where an additional amount of transmitted wave intensity indicated the decomposition of wavefields or the reflection of the redirected waves from the surfaces. Comparative studies of simulated precipitation images and modification of dislocation images caused by curvature and by the diffusion of an epitaxial junction were also performed." @default.
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- W2079357499 date "2000-05-21" @default.
- W2079357499 modified "2023-09-27" @default.
- W2079357499 title "Numerical simulation of Bragg-case section topographic images of dislocations in silicon" @default.
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- W2079357499 doi "https://doi.org/10.1088/0022-3727/33/10/314" @default.
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