FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2079389741> ?p ?o ?g. }

• W2079389741 endingPage "14439" @default.
• W2079389741 startingPage "14434" @default.
• W2079389741 abstract "Electrochemical micromachining (ECM) of p-type Si substrates is accomplished in HF-based solutions by applying nanosecond potential pulses between the substrate and a tungsten tool electrode. With sufficiently high potential pulses, the silicon potential locally reaches the electropolishing regime and microstructures may be machined. ECM precision is investigated as a function of pulse height, pulse duration, solution composition, and silicon doping level. Results show that micrometer precision may be obtained with highly doped substrates and that experimental data can be explained within a simple model, taking the charging time of the interface capacitance into account. In highly doped p-Si, well-defined microstructures can be realized without application of a mask on the surface. In addition, the isotropy of the process allows fabrication of structures not constrained by the crystal direction. In the case of low-doped material, ECM is only possible for very short pulses (<3 ns)." @default.
• W2079389741 created "2016-06-24" @default.
• W2079389741 creator A5009419156 @default.
• W2079389741 creator A5013629664 @default.
• W2079389741 creator A5016987319 @default.
• W2079389741 creator A5071528792 @default.
• W2079389741 creator A5084765230 @default.
• W2079389741 date "2004-07-03" @default.
• W2079389741 modified "2023-10-09" @default.
• W2079389741 title "Electrochemical Micromachining of p-Type Silicon" @default.
• W2079389741 cites W1670172520 @default.
• W2079389741 cites W1967893546 @default.
• W2079389741 cites W2001717407 @default.
• W2079389741 cites W2018256440 @default.
• W2079389741 cites W2033326863 @default.
• W2079389741 cites W2039157686 @default.
• W2079389741 cites W2058472376 @default.
• W2079389741 cites W2064635722 @default.
• W2079389741 cites W2071894748 @default.
• W2079389741 cites W2077448911 @default.
• W2079389741 cites W2078321682 @default.
• W2079389741 cites W2088357735 @default.
• W2079389741 cites W2099319187 @default.
• W2079389741 cites W2103274508 @default.
• W2079389741 cites W2110070104 @default.
• W2079389741 cites W2119612997 @default.
• W2079389741 cites W2147142329 @default.
• W2079389741 cites W2149668624 @default.
• W2079389741 cites W2162930691 @default.
• W2079389741 cites W4248546988 @default.
• W2079389741 cites W4251843769 @default.
• W2079389741 doi "https://doi.org/10.1021/jp0497312" @default.
• W2079389741 hasPublicationYear "2004" @default.
• W2079389741 type Work @default.
• W2079389741 sameAs 2079389741 @default.
• W2079389741 citedByCount "53" @default.
• W2079389741 countsByYear W20793897412012 @default.
• W2079389741 countsByYear W20793897412013 @default.
• W2079389741 countsByYear W20793897412014 @default.
• W2079389741 countsByYear W20793897412015 @default.
• W2079389741 countsByYear W20793897412016 @default.
• W2079389741 countsByYear W20793897412017 @default.
• W2079389741 countsByYear W20793897412018 @default.
• W2079389741 countsByYear W20793897412019 @default.
• W2079389741 countsByYear W20793897412020 @default.
• W2079389741 countsByYear W20793897412021 @default.
• W2079389741 countsByYear W20793897412022 @default.
• W2079389741 crossrefType "journal-article" @default.
• W2079389741 hasAuthorship W2079389741A5009419156 @default.
• W2079389741 hasAuthorship W2079389741A5013629664 @default.
• W2079389741 hasAuthorship W2079389741A5016987319 @default.
• W2079389741 hasAuthorship W2079389741A5071528792 @default.
• W2079389741 hasAuthorship W2079389741A5084765230 @default.
• W2079389741 hasConcept C111368507 @default.
• W2079389741 hasConcept C120665830 @default.
• W2079389741 hasConcept C121332964 @default.
• W2079389741 hasConcept C127313418 @default.
• W2079389741 hasConcept C136525101 @default.
• W2079389741 hasConcept C142724271 @default.
• W2079389741 hasConcept C145667562 @default.
• W2079389741 hasConcept C147789679 @default.
• W2079389741 hasConcept C169150495 @default.
• W2079389741 hasConcept C171250308 @default.
• W2079389741 hasConcept C171635847 @default.
• W2079389741 hasConcept C17525397 @default.
• W2079389741 hasConcept C184050105 @default.
• W2079389741 hasConcept C185592680 @default.
• W2079389741 hasConcept C191897082 @default.
• W2079389741 hasConcept C192562407 @default.
• W2079389741 hasConcept C204787440 @default.
• W2079389741 hasConcept C2777289219 @default.
• W2079389741 hasConcept C2777848306 @default.
• W2079389741 hasConcept C30066665 @default.
• W2079389741 hasConcept C49040817 @default.
• W2079389741 hasConcept C51141536 @default.
• W2079389741 hasConcept C520434653 @default.
• W2079389741 hasConcept C542268612 @default.
• W2079389741 hasConcept C544956773 @default.
• W2079389741 hasConcept C57863236 @default.
• W2079389741 hasConcept C68801617 @default.
• W2079389741 hasConcept C71924100 @default.
• W2079389741 hasConceptScore W2079389741C111368507 @default.
• W2079389741 hasConceptScore W2079389741C120665830 @default.
• W2079389741 hasConceptScore W2079389741C121332964 @default.
• W2079389741 hasConceptScore W2079389741C127313418 @default.
• W2079389741 hasConceptScore W2079389741C136525101 @default.
• W2079389741 hasConceptScore W2079389741C142724271 @default.
• W2079389741 hasConceptScore W2079389741C145667562 @default.
• W2079389741 hasConceptScore W2079389741C147789679 @default.
• W2079389741 hasConceptScore W2079389741C169150495 @default.
• W2079389741 hasConceptScore W2079389741C171250308 @default.
• W2079389741 hasConceptScore W2079389741C171635847 @default.
• W2079389741 hasConceptScore W2079389741C17525397 @default.
• W2079389741 hasConceptScore W2079389741C184050105 @default.
• W2079389741 hasConceptScore W2079389741C185592680 @default.
• W2079389741 hasConceptScore W2079389741C191897082 @default.
• W2079389741 hasConceptScore W2079389741C192562407 @default.
• W2079389741 hasConceptScore W2079389741C204787440 @default.

• next