Matches in SemOpenAlex for { <https://semopenalex.org/work/W2079391719> ?p ?o ?g. }
- W2079391719 endingPage "251" @default.
- W2079391719 startingPage "235" @default.
- W2079391719 abstract "Boron coatings are deposited at moderate temperature, equal or lower than 600 °C, from BBr3H2 mixtures in a microwave plasma. The deposition rate, the bromine content and the microhardness of the deposits are studied as functions of the deposition parameters. Amorphous boron films are obtained with both high deposition rates, up to 25 μm h−1, and high efficiencies. The bromine content can be lowered to 0.2 at.% and the microhardness varies in the range 1000–3000 kg mm−2 as a function of the temperature, the gaseous composition and the bias voltage applied to the substrate. The bias voltage does not significantly influence the deposition rate, but it can induce some important variations in the bromine content, the morphology and the microhardness. The deposition process is discussed; as a function of the deposition conditions, it appears controlled either by the availability of the inlet reactants or by the convective diffusion of the active intermediate species from their production place to the substrate surface." @default.
- W2079391719 created "2016-06-24" @default.
- W2079391719 creator A5015828559 @default.
- W2079391719 creator A5022115761 @default.
- W2079391719 creator A5076778862 @default.
- W2079391719 date "1990-11-01" @default.
- W2079391719 modified "2023-10-17" @default.
- W2079391719 title "Low temperature boron coatings by microwave plasma assisted chemical vapour deposition" @default.
- W2079391719 cites W1981310026 @default.
- W2079391719 cites W1984820605 @default.
- W2079391719 cites W1990506098 @default.
- W2079391719 cites W2060935387 @default.
- W2079391719 cites W2063159690 @default.
- W2079391719 cites W2070830845 @default.
- W2079391719 cites W2077127753 @default.
- W2079391719 cites W2167971705 @default.
- W2079391719 cites W2072316410 @default.
- W2079391719 doi "https://doi.org/10.1016/0040-6090(90)90069-p" @default.
- W2079391719 hasPublicationYear "1990" @default.
- W2079391719 type Work @default.
- W2079391719 sameAs 2079391719 @default.
- W2079391719 citedByCount "5" @default.
- W2079391719 crossrefType "journal-article" @default.
- W2079391719 hasAuthorship W2079391719A5015828559 @default.
- W2079391719 hasAuthorship W2079391719A5022115761 @default.
- W2079391719 hasAuthorship W2079391719A5076778862 @default.
- W2079391719 hasConcept C107872376 @default.
- W2079391719 hasConcept C111368507 @default.
- W2079391719 hasConcept C113196181 @default.
- W2079391719 hasConcept C121332964 @default.
- W2079391719 hasConcept C127313418 @default.
- W2079391719 hasConcept C127413603 @default.
- W2079391719 hasConcept C151730666 @default.
- W2079391719 hasConcept C165720898 @default.
- W2079391719 hasConcept C165801399 @default.
- W2079391719 hasConcept C171250308 @default.
- W2079391719 hasConcept C178790620 @default.
- W2079391719 hasConcept C185592680 @default.
- W2079391719 hasConcept C191897082 @default.
- W2079391719 hasConcept C192562407 @default.
- W2079391719 hasConcept C199289684 @default.
- W2079391719 hasConcept C20254490 @default.
- W2079391719 hasConcept C2777289219 @default.
- W2079391719 hasConcept C2816523 @default.
- W2079391719 hasConcept C42360764 @default.
- W2079391719 hasConcept C44838205 @default.
- W2079391719 hasConcept C501308230 @default.
- W2079391719 hasConcept C517835270 @default.
- W2079391719 hasConcept C56052488 @default.
- W2079391719 hasConcept C57410435 @default.
- W2079391719 hasConcept C62520636 @default.
- W2079391719 hasConcept C64297162 @default.
- W2079391719 hasConcept C8010536 @default.
- W2079391719 hasConcept C86803240 @default.
- W2079391719 hasConcept C87976508 @default.
- W2079391719 hasConceptScore W2079391719C107872376 @default.
- W2079391719 hasConceptScore W2079391719C111368507 @default.
- W2079391719 hasConceptScore W2079391719C113196181 @default.
- W2079391719 hasConceptScore W2079391719C121332964 @default.
- W2079391719 hasConceptScore W2079391719C127313418 @default.
- W2079391719 hasConceptScore W2079391719C127413603 @default.
- W2079391719 hasConceptScore W2079391719C151730666 @default.
- W2079391719 hasConceptScore W2079391719C165720898 @default.
- W2079391719 hasConceptScore W2079391719C165801399 @default.
- W2079391719 hasConceptScore W2079391719C171250308 @default.
- W2079391719 hasConceptScore W2079391719C178790620 @default.
- W2079391719 hasConceptScore W2079391719C185592680 @default.
- W2079391719 hasConceptScore W2079391719C191897082 @default.
- W2079391719 hasConceptScore W2079391719C192562407 @default.
- W2079391719 hasConceptScore W2079391719C199289684 @default.
- W2079391719 hasConceptScore W2079391719C20254490 @default.
- W2079391719 hasConceptScore W2079391719C2777289219 @default.
- W2079391719 hasConceptScore W2079391719C2816523 @default.
- W2079391719 hasConceptScore W2079391719C42360764 @default.
- W2079391719 hasConceptScore W2079391719C44838205 @default.
- W2079391719 hasConceptScore W2079391719C501308230 @default.
- W2079391719 hasConceptScore W2079391719C517835270 @default.
- W2079391719 hasConceptScore W2079391719C56052488 @default.
- W2079391719 hasConceptScore W2079391719C57410435 @default.
- W2079391719 hasConceptScore W2079391719C62520636 @default.
- W2079391719 hasConceptScore W2079391719C64297162 @default.
- W2079391719 hasConceptScore W2079391719C8010536 @default.
- W2079391719 hasConceptScore W2079391719C86803240 @default.
- W2079391719 hasConceptScore W2079391719C87976508 @default.
- W2079391719 hasIssue "2" @default.
- W2079391719 hasLocation W20793917191 @default.
- W2079391719 hasOpenAccess W2079391719 @default.
- W2079391719 hasPrimaryLocation W20793917191 @default.
- W2079391719 hasRelatedWork W2010582503 @default.
- W2079391719 hasRelatedWork W2066753314 @default.
- W2079391719 hasRelatedWork W2079391719 @default.
- W2079391719 hasRelatedWork W2083437883 @default.
- W2079391719 hasRelatedWork W2145920364 @default.
- W2079391719 hasRelatedWork W2354299464 @default.
- W2079391719 hasRelatedWork W2769686674 @default.
- W2079391719 hasRelatedWork W3118359290 @default.
- W2079391719 hasRelatedWork W3167402195 @default.
- W2079391719 hasRelatedWork W4247168144 @default.