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- W2079402578 abstract "Surface and Interface AnalysisVolume 12, Issue 5 p. 322-323 Extended Abstract Thin Si3N4 films on Si wafers M. F. Ebel, M. F. Ebel Institut für Angewandte und Technische Physik, Technische Universität Wien, Vienna, AustriaSearch for more papers by this authorH. Ebel, H. Ebel Institut für Angewandte und Technische Physik, Technische Universität Wien, Vienna, AustriaSearch for more papers by this authorH. Buchner, H. Buchner Institut für Angewandte und Technische Physik, Technische Universität Wien, Vienna, AustriaSearch for more papers by this authorR. Chabicovsky, R. Chabicovsky Institut für Allgemeine Elektrotechnik und Elektronik, Technische Universität Wien, Vienna, AustriaSearch for more papers by this author M. F. Ebel, M. F. Ebel Institut für Angewandte und Technische Physik, Technische Universität Wien, Vienna, AustriaSearch for more papers by this authorH. Ebel, H. Ebel Institut für Angewandte und Technische Physik, Technische Universität Wien, Vienna, AustriaSearch for more papers by this authorH. Buchner, H. Buchner Institut für Angewandte und Technische Physik, Technische Universität Wien, Vienna, AustriaSearch for more papers by this authorR. Chabicovsky, R. Chabicovsky Institut für Allgemeine Elektrotechnik und Elektronik, Technische Universität Wien, Vienna, AustriaSearch for more papers by this author First published: July 1988 https://doi.org/10.1002/sia.740120510AboutPDF ToolsRequest permissionExport citationAdd to favoritesTrack citation ShareShare Give accessShare full text accessShare full-text accessPlease review our Terms and Conditions of Use and check box below to share full-text version of article.I have read and accept the Wiley Online Library Terms and Conditions of UseShareable LinkUse the link below to share a full-text version of this article with your friends and colleagues. Learn more.Copy URL Share a linkShare onFacebookTwitterLinkedInRedditWechat No abstract is available for this article. Volume12, Issue5July 1988Pages 322-323 RelatedInformation" @default.
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