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• W2079436027 abstract "The etching rate of Mo samples in a planar glow discharge configuration using Ar as discharge gas is measured as a function of applied power density (0–10 Wcm2) and pressure inside the discharge cell (365–750 mTorr). These etching rates are compared with calculated values obtained by modeling of a one dimensional planar glow discharge. The structure of the cathode fall region is modeled in terms of a set of one-dimensional Boltzmann equations describing the three main particle types, ions, neutrals and electrons. Numerical solution of these equations provide the etching rate of the target and the energy distributions of the components. Satisfactory correlation between the measured and calculated etching rates allowed it to conclude also that other quantities for understanding plasma processes like the diffusion profiles of sputtered neutrals can reliably be predicted." @default.
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• W2079436027 date "1991-01-01" @default.
• W2079436027 modified "2023-10-15" @default.
• W2079436027 title "Sample erosion studies and modeling in a glow discharge ionization cell" @default.
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• W2079436027 doi "https://doi.org/10.1016/0584-8547(91)80029-3" @default.
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