Matches in SemOpenAlex for { <https://semopenalex.org/work/W2079454151> ?p ?o ?g. }
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- W2079454151 endingPage "242" @default.
- W2079454151 startingPage "239" @default.
- W2079454151 abstract "Abstract This paper describes our recent results in high resolution synchrotron radiation lithography. Theoretically we show an image analysis based on the absorbed dose distribution in the x-ray resist rather than on the diffraction intensity calculations. Experimental results are presented, demonstrating a successful replication of very small periodic gratings using high resolution SiC/W masks and a high performance commercial x-ray stepper." @default.
- W2079454151 created "2016-06-24" @default.
- W2079454151 creator A5005113685 @default.
- W2079454151 creator A5025688601 @default.
- W2079454151 creator A5054223860 @default.
- W2079454151 creator A5060262338 @default.
- W2079454151 creator A5075123100 @default.
- W2079454151 creator A5086425118 @default.
- W2079454151 creator A5091336643 @default.
- W2079454151 date "1994-01-01" @default.
- W2079454151 modified "2023-09-24" @default.
- W2079454151 title "Replication of very small periodic gratings with proximity x-ray lithography" @default.
- W2079454151 cites W1975816485 @default.
- W2079454151 cites W1976996987 @default.
- W2079454151 cites W1998875246 @default.
- W2079454151 cites W2017067045 @default.
- W2079454151 doi "https://doi.org/10.1016/0167-9317(94)90146-5" @default.
- W2079454151 hasPublicationYear "1994" @default.
- W2079454151 type Work @default.
- W2079454151 sameAs 2079454151 @default.
- W2079454151 citedByCount "11" @default.
- W2079454151 crossrefType "journal-article" @default.
- W2079454151 hasAuthorship W2079454151A5005113685 @default.
- W2079454151 hasAuthorship W2079454151A5025688601 @default.
- W2079454151 hasAuthorship W2079454151A5054223860 @default.
- W2079454151 hasAuthorship W2079454151A5060262338 @default.
- W2079454151 hasAuthorship W2079454151A5075123100 @default.
- W2079454151 hasAuthorship W2079454151A5086425118 @default.
- W2079454151 hasAuthorship W2079454151A5091336643 @default.
- W2079454151 hasConcept C120665830 @default.
- W2079454151 hasConcept C121332964 @default.
- W2079454151 hasConcept C12590798 @default.
- W2079454151 hasConcept C159047783 @default.
- W2079454151 hasConcept C171250308 @default.
- W2079454151 hasConcept C192562407 @default.
- W2079454151 hasConcept C204223013 @default.
- W2079454151 hasConcept C2779227376 @default.
- W2079454151 hasConcept C2779328170 @default.
- W2079454151 hasConcept C41794268 @default.
- W2079454151 hasConcept C49040817 @default.
- W2079454151 hasConcept C53524968 @default.
- W2079454151 hasConcept C86803240 @default.
- W2079454151 hasConceptScore W2079454151C120665830 @default.
- W2079454151 hasConceptScore W2079454151C121332964 @default.
- W2079454151 hasConceptScore W2079454151C12590798 @default.
- W2079454151 hasConceptScore W2079454151C159047783 @default.
- W2079454151 hasConceptScore W2079454151C171250308 @default.
- W2079454151 hasConceptScore W2079454151C192562407 @default.
- W2079454151 hasConceptScore W2079454151C204223013 @default.
- W2079454151 hasConceptScore W2079454151C2779227376 @default.
- W2079454151 hasConceptScore W2079454151C2779328170 @default.
- W2079454151 hasConceptScore W2079454151C41794268 @default.
- W2079454151 hasConceptScore W2079454151C49040817 @default.
- W2079454151 hasConceptScore W2079454151C53524968 @default.
- W2079454151 hasConceptScore W2079454151C86803240 @default.
- W2079454151 hasIssue "1-4" @default.
- W2079454151 hasLocation W20794541511 @default.
- W2079454151 hasOpenAccess W2079454151 @default.
- W2079454151 hasPrimaryLocation W20794541511 @default.
- W2079454151 hasRelatedWork W1974090252 @default.
- W2079454151 hasRelatedWork W2004026453 @default.
- W2079454151 hasRelatedWork W2019317124 @default.
- W2079454151 hasRelatedWork W2030574250 @default.
- W2079454151 hasRelatedWork W2042600631 @default.
- W2079454151 hasRelatedWork W2137981895 @default.
- W2079454151 hasRelatedWork W2264052921 @default.
- W2079454151 hasRelatedWork W2267849067 @default.
- W2079454151 hasRelatedWork W2345933932 @default.
- W2079454151 hasRelatedWork W2379895103 @default.
- W2079454151 hasVolume "23" @default.
- W2079454151 isParatext "false" @default.
- W2079454151 isRetracted "false" @default.
- W2079454151 magId "2079454151" @default.
- W2079454151 workType "article" @default.