Matches in SemOpenAlex for { <https://semopenalex.org/work/W2079475573> ?p ?o ?g. }
Showing items 1 to 76 of
76
with 100 items per page.
- W2079475573 endingPage "3520" @default.
- W2079475573 startingPage "3516" @default.
- W2079475573 abstract "Dry etching-induced damage is investigated using radical-beam ion-beam etching. This technique allows the systematic study of process-induced damage over a wide range of etching rates and with varying components of physical and chemical etching. Induced damage is characterized by I-V measurements from Schottky diodes on etched surfaces and from luminescence from quantum wells situated in close proximity to etched surfaces. We have designed a novel multiple-quantum-well probe structure that also includes a 4000 Å-thick quarter-wavelength mirror stack layer to allow in situ monitoring of etch rate and etched depth. Our work examines damage as a function of ion beam voltage and beam current density, microwave power, and with and without a reactive gas. We have found that damage increases with increased ion energy and decreases with etch yield." @default.
- W2079475573 created "2016-06-24" @default.
- W2079475573 creator A5004078449 @default.
- W2079475573 date "1991-11-01" @default.
- W2079475573 modified "2023-09-25" @default.
- W2079475573 title "Investigation of radical-beam ion-beam etching-induced damage in GaAs/AlGaAs quantum-well structures" @default.
- W2079475573 doi "https://doi.org/10.1116/1.585835" @default.
- W2079475573 hasPublicationYear "1991" @default.
- W2079475573 type Work @default.
- W2079475573 sameAs 2079475573 @default.
- W2079475573 citedByCount "7" @default.
- W2079475573 crossrefType "journal-article" @default.
- W2079475573 hasAuthorship W2079475573A5004078449 @default.
- W2079475573 hasConcept C100460472 @default.
- W2079475573 hasConcept C120665830 @default.
- W2079475573 hasConcept C121332964 @default.
- W2079475573 hasConcept C130472188 @default.
- W2079475573 hasConcept C145148216 @default.
- W2079475573 hasConcept C161866238 @default.
- W2079475573 hasConcept C168834538 @default.
- W2079475573 hasConcept C171250308 @default.
- W2079475573 hasConcept C178790620 @default.
- W2079475573 hasConcept C185592680 @default.
- W2079475573 hasConcept C192562407 @default.
- W2079475573 hasConcept C199360897 @default.
- W2079475573 hasConcept C205200001 @default.
- W2079475573 hasConcept C2779227376 @default.
- W2079475573 hasConcept C29169072 @default.
- W2079475573 hasConcept C41008148 @default.
- W2079475573 hasConcept C49040817 @default.
- W2079475573 hasConcept C50774322 @default.
- W2079475573 hasConcept C520434653 @default.
- W2079475573 hasConcept C78434282 @default.
- W2079475573 hasConcept C9395851 @default.
- W2079475573 hasConceptScore W2079475573C100460472 @default.
- W2079475573 hasConceptScore W2079475573C120665830 @default.
- W2079475573 hasConceptScore W2079475573C121332964 @default.
- W2079475573 hasConceptScore W2079475573C130472188 @default.
- W2079475573 hasConceptScore W2079475573C145148216 @default.
- W2079475573 hasConceptScore W2079475573C161866238 @default.
- W2079475573 hasConceptScore W2079475573C168834538 @default.
- W2079475573 hasConceptScore W2079475573C171250308 @default.
- W2079475573 hasConceptScore W2079475573C178790620 @default.
- W2079475573 hasConceptScore W2079475573C185592680 @default.
- W2079475573 hasConceptScore W2079475573C192562407 @default.
- W2079475573 hasConceptScore W2079475573C199360897 @default.
- W2079475573 hasConceptScore W2079475573C205200001 @default.
- W2079475573 hasConceptScore W2079475573C2779227376 @default.
- W2079475573 hasConceptScore W2079475573C29169072 @default.
- W2079475573 hasConceptScore W2079475573C41008148 @default.
- W2079475573 hasConceptScore W2079475573C49040817 @default.
- W2079475573 hasConceptScore W2079475573C50774322 @default.
- W2079475573 hasConceptScore W2079475573C520434653 @default.
- W2079475573 hasConceptScore W2079475573C78434282 @default.
- W2079475573 hasConceptScore W2079475573C9395851 @default.
- W2079475573 hasIssue "6" @default.
- W2079475573 hasLocation W20794755731 @default.
- W2079475573 hasOpenAccess W2079475573 @default.
- W2079475573 hasPrimaryLocation W20794755731 @default.
- W2079475573 hasRelatedWork W1977506915 @default.
- W2079475573 hasRelatedWork W2020883466 @default.
- W2079475573 hasRelatedWork W2056511809 @default.
- W2079475573 hasRelatedWork W2083636795 @default.
- W2079475573 hasRelatedWork W2131444697 @default.
- W2079475573 hasRelatedWork W2148274091 @default.
- W2079475573 hasRelatedWork W2309323165 @default.
- W2079475573 hasRelatedWork W2361654534 @default.
- W2079475573 hasRelatedWork W3036094904 @default.
- W2079475573 hasRelatedWork W3113407646 @default.
- W2079475573 hasVolume "9" @default.
- W2079475573 isParatext "false" @default.
- W2079475573 isRetracted "false" @default.
- W2079475573 magId "2079475573" @default.
- W2079475573 workType "article" @default.