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• W2079482805 endingPage "7043" @default.
• W2079482805 startingPage "7032" @default.
• W2079482805 abstract "The growth of nanoparticles between electrodes in a pulsed very high frequency (VHF) silane–hydrogen (SiH4–H2) plasma under hydrogenated microcrystalline silicon (µc-Si:H) growth conditions has been studied by time-resolved cavity ringdown (τ-CRD) spectroscopy. The light absorption of silyl (SiH3) radicals and the light scattering and absorption of nanoparticles have been measured in the UV spectral range (220 and 280 nm). The contribution of the SiH3 radicals and nanoparticles to the measured cavity loss could be distinguished by 1) varying the wavelength of the probe laser pulse, 2) using time-resolved information of the SiH3 radicals and the nanoparticle density, 3) the measured spatial distribution of the species between the electrodes, and 4) the dependence of these distributions on the electrode temperature. From the time evolution of cavity loss related to the nanoparticles growing in plasma, we can determine whether the light losses of the nanoparticles are in the Rayleigh or Mie regime. Subsequently, these measurements also provide information on typical particle size. Additional scanning electron microscopy (SEM) analyses, which reveal the evolution of the nanoparticle size distribution with time, corroborate the results obtained by τ-CRD. Finally, the spatial distribution of the SiH3 radical density and the electrode temperature dependence of the nanoparticles between the electrodes have been studied. These results are discussed in terms of the dominant forces acting on nanoparticles in plasma and the nanoparticle growth mechanism." @default.
• W2079482805 created "2016-06-24" @default.
• W2079482805 creator A5032802831 @default.
• W2079482805 creator A5058364729 @default.
• W2079482805 creator A5065478102 @default.
• W2079482805 date "2008-09-12" @default.
• W2079482805 modified "2023-10-12" @default.
• W2079482805 title "Formation of SiH₃Radicals and Nanoparticles in SiH₄–H₂Plasmas Observed by Time-Resolved Cavity Ringdown Spectroscopy" @default.
• W2079482805 cites W1518884678 @default.
• W2079482805 cites W1637904466 @default.
• W2079482805 cites W1966212317 @default.
• W2079482805 cites W1977514428 @default.
• W2079482805 cites W1981048854 @default.
• W2079482805 cites W1981247648 @default.
• W2079482805 cites W1982812888 @default.
• W2079482805 cites W1983004968 @default.
• W2079482805 cites W1985442126 @default.
• W2079482805 cites W1990323302 @default.
• W2079482805 cites W1991035979 @default.
• W2079482805 cites W1991344782 @default.
• W2079482805 cites W1992235941 @default.
• W2079482805 cites W1996342642 @default.
• W2079482805 cites W1997168496 @default.
• W2079482805 cites W1997384506 @default.
• W2079482805 cites W1998188516 @default.
• W2079482805 cites W2000235953 @default.
• W2079482805 cites W2003513100 @default.
• W2079482805 cites W2004175611 @default.
• W2079482805 cites W2011413488 @default.
• W2079482805 cites W2014162649 @default.
• W2079482805 cites W2018115221 @default.
• W2079482805 cites W2018268580 @default.
• W2079482805 cites W2020797203 @default.
• W2079482805 cites W2024002720 @default.
• W2079482805 cites W2026148150 @default.
• W2079482805 cites W2027133164 @default.
• W2079482805 cites W2031009805 @default.
• W2079482805 cites W2032322882 @default.
• W2079482805 cites W2038992578 @default.
• W2079482805 cites W2044349154 @default.
• W2079482805 cites W2046533733 @default.
• W2079482805 cites W2047847946 @default.
• W2079482805 cites W2048719419 @default.
• W2079482805 cites W2050082008 @default.
• W2079482805 cites W2051705560 @default.
• W2079482805 cites W2056850850 @default.
• W2079482805 cites W2057900006 @default.
• W2079482805 cites W2058876793 @default.
• W2079482805 cites W2059196344 @default.
• W2079482805 cites W2065226331 @default.
• W2079482805 cites W2067719115 @default.
• W2079482805 cites W2067886721 @default.
• W2079482805 cites W2075170070 @default.
• W2079482805 cites W2077511454 @default.
• W2079482805 cites W2082557116 @default.
• W2079482805 cites W2084079138 @default.
• W2079482805 cites W2091860114 @default.
• W2079482805 cites W2093766769 @default.
• W2079482805 cites W2103470324 @default.
• W2079482805 cites W2120847367 @default.
• W2079482805 cites W2155532339 @default.
• W2079482805 cites W2168124927 @default.
• W2079482805 cites W2171075869 @default.
• W2079482805 doi "https://doi.org/10.1143/jjap.47.7032" @default.
• W2079482805 hasPublicationYear "2008" @default.
• W2079482805 type Work @default.
• W2079482805 sameAs 2079482805 @default.
• W2079482805 citedByCount "5" @default.
• W2079482805 countsByYear W20794828052015 @default.
• W2079482805 countsByYear W20794828052017 @default.
• W2079482805 countsByYear W20794828052019 @default.
• W2079482805 crossrefType "journal-article" @default.
• W2079482805 hasAuthorship W2079482805A5032802831 @default.
• W2079482805 hasAuthorship W2079482805A5058364729 @default.
• W2079482805 hasAuthorship W2079482805A5065478102 @default.
• W2079482805 hasConcept C113196181 @default.
• W2079482805 hasConcept C119824511 @default.
• W2079482805 hasConcept C120665830 @default.
• W2079482805 hasConcept C121332964 @default.
• W2079482805 hasConcept C125287762 @default.
• W2079482805 hasConcept C139066938 @default.
• W2079482805 hasConcept C155672457 @default.
• W2079482805 hasConcept C159985019 @default.
• W2079482805 hasConcept C171250308 @default.
• W2079482805 hasConcept C178790620 @default.
• W2079482805 hasConcept C185592680 @default.
• W2079482805 hasConcept C192562407 @default.
• W2079482805 hasConcept C32891209 @default.
• W2079482805 hasConcept C43617362 @default.
• W2079482805 hasConcept C46244369 @default.
• W2079482805 hasConcept C62520636 @default.
• W2079482805 hasConcept C82706917 @default.
• W2079482805 hasConceptScore W2079482805C113196181 @default.
• W2079482805 hasConceptScore W2079482805C119824511 @default.
• W2079482805 hasConceptScore W2079482805C120665830 @default.
• W2079482805 hasConceptScore W2079482805C121332964 @default.
• W2079482805 hasConceptScore W2079482805C125287762 @default.
• W2079482805 hasConceptScore W2079482805C139066938 @default.

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