Matches in SemOpenAlex for { <https://semopenalex.org/work/W2079490078> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W2079490078 abstract "One of the key issues in extreme ultraviolet lithography (EUVL) is the influence of defects on a mask because of the high printing resolution of EUVL. In order to address this issue, it is necessary to estimate the critical size of an absorber pattern defect and that of a repaired defect. The repair of an opaque defect by milling or of a clear defect by deposition might not be perfect; so the area, height, and optical constant of the repair material must be taken into consideration. By estimating the threshold of calculated aerial images, the critical dimension (CD) that can be printed was found to equal the square root of the defect area. For the repair of opaque defects, residual Ta was found to be more likely to cause poor printing than the etching of the multilayer by excessive milling. Since a clear defect is repaired with Ta with the same optical properties as the absorber material, the CD error in printing is mainly caused by the repair of a CD error and is not caused by an error in height that is less than ±25% of the height of the Ta absorber. The optimal optical constant of the repair material was estimated by varying the refraction coefficient from 0.9199 to 0.9999 and the extinction coefficient form 0.0001 to -0.0451. We found that carbon is a useful repair material that provides a CD error of at most ±0.5 nm around a defect with an area of 64 nm because the maximum refraction should be below 0.97." @default.
- W2079490078 created "2016-06-24" @default.
- W2079490078 creator A5001423950 @default.
- W2079490078 creator A5079814086 @default.
- W2079490078 creator A5080200487 @default.
- W2079490078 creator A5086373845 @default.
- W2079490078 creator A5089241212 @default.
- W2079490078 date "2007-10-05" @default.
- W2079490078 modified "2023-09-25" @default.
- W2079490078 title "Repair specification study for half-pitch 32-nm patterns for EUVL" @default.
- W2079490078 doi "https://doi.org/10.1117/12.746586" @default.
- W2079490078 hasPublicationYear "2007" @default.
- W2079490078 type Work @default.
- W2079490078 sameAs 2079490078 @default.
- W2079490078 citedByCount "14" @default.
- W2079490078 countsByYear W20794900782012 @default.
- W2079490078 countsByYear W20794900782013 @default.
- W2079490078 countsByYear W20794900782014 @default.
- W2079490078 countsByYear W20794900782015 @default.
- W2079490078 crossrefType "proceedings-article" @default.
- W2079490078 hasAuthorship W2079490078A5001423950 @default.
- W2079490078 hasAuthorship W2079490078A5079814086 @default.
- W2079490078 hasAuthorship W2079490078A5080200487 @default.
- W2079490078 hasAuthorship W2079490078A5086373845 @default.
- W2079490078 hasAuthorship W2079490078A5089241212 @default.
- W2079490078 hasConcept C100460472 @default.
- W2079490078 hasConcept C105487726 @default.
- W2079490078 hasConcept C120665830 @default.
- W2079490078 hasConcept C121332964 @default.
- W2079490078 hasConcept C159985019 @default.
- W2079490078 hasConcept C162996421 @default.
- W2079490078 hasConcept C192562407 @default.
- W2079490078 hasConcept C204223013 @default.
- W2079490078 hasConcept C2779227376 @default.
- W2079490078 hasConcept C49040817 @default.
- W2079490078 hasConcept C60056205 @default.
- W2079490078 hasConcept C76046532 @default.
- W2079490078 hasConceptScore W2079490078C100460472 @default.
- W2079490078 hasConceptScore W2079490078C105487726 @default.
- W2079490078 hasConceptScore W2079490078C120665830 @default.
- W2079490078 hasConceptScore W2079490078C121332964 @default.
- W2079490078 hasConceptScore W2079490078C159985019 @default.
- W2079490078 hasConceptScore W2079490078C162996421 @default.
- W2079490078 hasConceptScore W2079490078C192562407 @default.
- W2079490078 hasConceptScore W2079490078C204223013 @default.
- W2079490078 hasConceptScore W2079490078C2779227376 @default.
- W2079490078 hasConceptScore W2079490078C49040817 @default.
- W2079490078 hasConceptScore W2079490078C60056205 @default.
- W2079490078 hasConceptScore W2079490078C76046532 @default.
- W2079490078 hasLocation W20794900781 @default.
- W2079490078 hasOpenAccess W2079490078 @default.
- W2079490078 hasPrimaryLocation W20794900781 @default.
- W2079490078 hasRelatedWork W1008141977 @default.
- W2079490078 hasRelatedWork W1990897501 @default.
- W2079490078 hasRelatedWork W1996907800 @default.
- W2079490078 hasRelatedWork W2022331525 @default.
- W2079490078 hasRelatedWork W2036968101 @default.
- W2079490078 hasRelatedWork W23335930 @default.
- W2079490078 hasRelatedWork W2739618422 @default.
- W2079490078 hasRelatedWork W2799088885 @default.
- W2079490078 hasRelatedWork W2990131135 @default.
- W2079490078 hasRelatedWork W3122703849 @default.
- W2079490078 isParatext "false" @default.
- W2079490078 isRetracted "false" @default.
- W2079490078 magId "2079490078" @default.
- W2079490078 workType "article" @default.