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- W2079493034 abstract "Six sigma methods were used to evaluate the effect of package design on the performance of an oil-isolated resonant pressure sensor. The sensor was rated at 35 mbar range and -55°C to +125°C operating temperature. The accuracy requirement on the sensor was 0.01% full scale and flowed down to an equivalent requirement of < 0.01 mbar of package induced error in the sensor. Beyond this error, package effects would destroy measurement accuracy in addition to underutilizing sensor capability. Six sigma studies and experiments on an optimized package design suggested that repeatability effects cannot be measured to statistical significance by any known external method such as optical interferometry, thus suggesting that a MEMS sensor is possibly the best and only method of evaluating low residual strain." @default.
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- W2079493034 date "2006-01-01" @default.
- W2079493034 modified "2023-09-26" @default.
- W2079493034 title "Six Sigma Methodology for Sensor Package Evaluation" @default.
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- W2079493034 doi "https://doi.org/10.1115/imece2006-13734" @default.
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