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- W2079557567 abstract "A number of distance control methods have been developed that allow the direct ablation capabilities of the ArF excimer laser to be applied to near-field optical methods of nanopatterning. Feedback systems based on evanescent field detection, capacitance, and lateral atomic force sensing have been incorporated into our near-field optical nanofabrication system. Using these control techniques, structures were directly patterned on a variety of substrates with dimension on the order of 100 nm. These feedback techniques are versatile enough to allow accurate distance control despite severe disturbances to the system caused by high energy excimer laser pulses." @default.
- W2079557567 created "2016-06-24" @default.
- W2079557567 creator A5012663940 @default.
- W2079557567 creator A5023713734 @default.
- W2079557567 creator A5024264517 @default.
- W2079557567 creator A5024275741 @default.
- W2079557567 date "1994-05-17" @default.
- W2079557567 modified "2023-09-24" @default.
- W2079557567 title "<title>Near-field nanofabrication with pipette-guided ArF excimer laser</title>" @default.
- W2079557567 doi "https://doi.org/10.1117/12.175473" @default.
- W2079557567 hasPublicationYear "1994" @default.
- W2079557567 type Work @default.
- W2079557567 sameAs 2079557567 @default.
- W2079557567 citedByCount "1" @default.
- W2079557567 crossrefType "proceedings-article" @default.
- W2079557567 hasAuthorship W2079557567A5012663940 @default.
- W2079557567 hasAuthorship W2079557567A5023713734 @default.
- W2079557567 hasAuthorship W2079557567A5024264517 @default.
- W2079557567 hasAuthorship W2079557567A5024275741 @default.
- W2079557567 hasConcept C120665830 @default.
- W2079557567 hasConcept C121332964 @default.
- W2079557567 hasConcept C136525101 @default.
- W2079557567 hasConcept C142724271 @default.
- W2079557567 hasConcept C147789679 @default.
- W2079557567 hasConcept C151552171 @default.
- W2079557567 hasConcept C162117346 @default.
- W2079557567 hasConcept C171250308 @default.
- W2079557567 hasConcept C185592680 @default.
- W2079557567 hasConcept C192562407 @default.
- W2079557567 hasConcept C202444582 @default.
- W2079557567 hasConcept C204787440 @default.
- W2079557567 hasConcept C207789793 @default.
- W2079557567 hasConcept C2779188808 @default.
- W2079557567 hasConcept C2780477314 @default.
- W2079557567 hasConcept C33923547 @default.
- W2079557567 hasConcept C49040817 @default.
- W2079557567 hasConcept C520434653 @default.
- W2079557567 hasConcept C71924100 @default.
- W2079557567 hasConcept C74561354 @default.
- W2079557567 hasConcept C9652623 @default.
- W2079557567 hasConceptScore W2079557567C120665830 @default.
- W2079557567 hasConceptScore W2079557567C121332964 @default.
- W2079557567 hasConceptScore W2079557567C136525101 @default.
- W2079557567 hasConceptScore W2079557567C142724271 @default.
- W2079557567 hasConceptScore W2079557567C147789679 @default.
- W2079557567 hasConceptScore W2079557567C151552171 @default.
- W2079557567 hasConceptScore W2079557567C162117346 @default.
- W2079557567 hasConceptScore W2079557567C171250308 @default.
- W2079557567 hasConceptScore W2079557567C185592680 @default.
- W2079557567 hasConceptScore W2079557567C192562407 @default.
- W2079557567 hasConceptScore W2079557567C202444582 @default.
- W2079557567 hasConceptScore W2079557567C204787440 @default.
- W2079557567 hasConceptScore W2079557567C207789793 @default.
- W2079557567 hasConceptScore W2079557567C2779188808 @default.
- W2079557567 hasConceptScore W2079557567C2780477314 @default.
- W2079557567 hasConceptScore W2079557567C33923547 @default.
- W2079557567 hasConceptScore W2079557567C49040817 @default.
- W2079557567 hasConceptScore W2079557567C520434653 @default.
- W2079557567 hasConceptScore W2079557567C71924100 @default.
- W2079557567 hasConceptScore W2079557567C74561354 @default.
- W2079557567 hasConceptScore W2079557567C9652623 @default.
- W2079557567 hasLocation W20795575671 @default.
- W2079557567 hasOpenAccess W2079557567 @default.
- W2079557567 hasPrimaryLocation W20795575671 @default.
- W2079557567 hasRelatedWork W1630995854 @default.
- W2079557567 hasRelatedWork W2000818912 @default.
- W2079557567 hasRelatedWork W2030608854 @default.
- W2079557567 hasRelatedWork W2052880054 @default.
- W2079557567 hasRelatedWork W2079557567 @default.
- W2079557567 hasRelatedWork W2104508024 @default.
- W2079557567 hasRelatedWork W2130130779 @default.
- W2079557567 hasRelatedWork W2415424868 @default.
- W2079557567 hasRelatedWork W4321075865 @default.
- W2079557567 hasRelatedWork W47883179 @default.
- W2079557567 isParatext "false" @default.
- W2079557567 isRetracted "false" @default.
- W2079557567 magId "2079557567" @default.
- W2079557567 workType "article" @default.